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3585篇 您的检索式：期刊名="Sensor Actuator A"

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	题名	作者	年代	出处	被引量
1	The constituent equation of piezoelectric bi- morphs显示文摘	SMITS Jan G DALKE Susan I COONEY Thomas K	1991	Sensors and Actuator A1991，28，1：	2
2	The theoretical analysis on damping characteristics of resonant microbeam in vacuum显示文摘	Li Bing-qian Wu Hao-yang Zhu Chang-chun	1999	Sensors & Actuators A1999，70，：	2
3	Micromachined corner cube reflectors as a communication link显示文摘	D S Gunawan L-Y Lin K S J Pister	1995	Sensors and Actuators A1995，47，13：	2
4	Selection of glass, compatibility anodic bonding conditions for silicon-glass capacitive and material sensors显示文摘	Rogers T Kowal J	1995	Sensors and Actuators A1995，47，：	2
5	Silicon-on-insulator(SOI)structures for pressure sensors显示文摘	Givargizov G I Limanoy A B Prjakhin G D	1991	Sensors and Actuators A1991，28，：	2
6	The NanoPirani-an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping显示文摘	PUERS R REYNTJENS S BRUYKER D D	2002	Sensor and Actuators A2002，9798，：	2
7	Improvement of bonding time and quality of anodic bonding using the spiral arrangement of multiple point electrodes 显示文摘	Huang Jung-tang Yang Hsueh-an	2002	Sensors and Actuators A2002，102，：	2
8	Soudium distribution in thin-film anodic bonding显示文摘	Visser M M Weichel S Storas P	2001	Sensors and Actuators A2001，92，：	2
9	Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates 显示文摘	Thomas M H Lee Lee D H Y	2002	Sensors and Actuators A2002，86，：	2
10	Polycrystalline silicon strain sensors 显示文摘	French P J Evans A G R	1985	Sensors and Actuators A1985，7，：	2
11	Response of nanocomposite pyroelectric detectors 显示文摘	CHEN Y CHAN W L H HUI N M	1998	Sensors and Actuators A1998，69，1：	2
12	The piezoelectric valve-less pump-performance enhancement analysis 显示文摘	ULLMANN A	1998	Sensors and Actuators A1998，69，1：	1
13	Novel fiber optic accelerometer system using geometric moire fringe显示文摘	MARIA Q F KIM D H	2006	Sensors and Actuators A2006，128，1：	1
14	CMOS-compatible position sensitive devices (PSDs) based on photo detector arrays显示文摘	MAKYNEN A RUOTSALAINEN T RAHKONNEN T	2003	Sensors and Actuators A2003，1115，3：	1
15	Oblique Powder Blasting For Three - dimensional Micromachining of Brittle Materials 显示文摘	Belloy E Sayah A Gijs M A M	2001	Sensors and Actuators A : Physical2001，92，13：	1
16	Preliminary development of a hydrocarbon-fueled catalytic micro-combustor显示文摘	SPADACCINI C M ZHANG X CADOU C P	2003	Sensors mad Actuators A2003，103，12：	1
17	Effect of the metal- to- wire ratio on the high -frequency magnetoim-pedance of glass - coated CoFeBSi amorphous microwires 显示文摘	Valenzuela R Fessant A Gieraltowski J	2008	Sensors and Actuators A2008，142，2：	1
18	Roughening of single-crystal silicon surface etched by KOH water solution显示文摘	Shikida Mitsuhiro Yamashiro Takashi	1999	Sensors and Actuators A1999，73，12：	1
19	A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers显示文摘	A Bertz M Kuchler R Knofler T Gessner	2002	Sensors and Actuators A2002，9798，：	1
20	Generation of electrical energy for portable devices:comparative study of an electromagnetic and a piezoelectric system显示文摘	Poulin G Sarraute E Costa F	2004	Sensors and Actuators A2004，116，3：	1

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