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1335篇 您的检索式：期刊名="Vacuum Science"

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	题名	作者	年代	出处	被引量
1	Origin of electrical property distribution on the surface of ZnO: Al films prepared by magnetron sputtering 显示文摘	Minami T Miyata T Yamamoto T	2000	Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films2000，18，：	1
2	Influence of modeling and simulation on the maturation of plasma technology: Feature evolution and reactor design 显示文摘	Graves D B Kushner M J	2003	Journal of Vacuum Science Technology2003，21，5：	1
3	Reclamation of vacuum pump fluids显示文摘	Whitman C B	1987	Journal of Vacuum Science & Technology1987，5，2：	1
4	Compact synchrotron radiation lithography system for 70 nm device manufacturing 显示文摘	MIYATAKE T LI T HIROSE S	2001	Journal of Vacuum Science & Technology: B2001，19，6：	1
5	The influence of preparation conditions on the optical properties of titanium nitride based solar control films显示文摘	Georgson M Roos A Ribbing C G	1991	Journal of Vacuum Science & Technology A (Vacuum Surfaces and Films)1991，9，4：	1
6	Semicon- ductor nanopores formed by chemical vapor deposition of he teroepitaxial SiC films on SOI (100) substrates 显示文摘	IKOMA Y YAHAYA H KURIYAMA K	2011	Journal of Vacuum Science : Technology: B2011，29，6：	1
7	Modified Postannealing of the Ge Condensation Process for Better-strained Si Material and Devices 显示文摘	Liu X Y Ma X B Du X F	2010	Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures2010，28，5：	1
8	Variable magnetic field Hall effect measurements and analysis of high purity Hg vacancy(p-type)HgCdTe 显示文摘	GOLD M C NELSON D A	1986	Journal of Vacuum Science & Tech-nology1986，4，4：	1
9	Microstructure and Bulk Reactivity of the Nonevaporable Getter Zr57V36Fe7显示文摘	Günter MM Herein D Schumacher R	1998	Journal Vacuum of Science and Technology1998，16，6：	1
10	Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four- mirror optical system显示文摘	Naulleau P P Goldberg K A Bokor J	2000	J Vacuum Science : Technology B: Microelectronics and Nanometer Structures2000，18，6：	1
11	Adhesion improvement of plasmadeposited silica thin films on stainless steel substrate studied by x-ray photoemission spectroscopy and in situ infrared ellipsometry显示文摘	Bertrand N Drevillon B	1998	Journal of vacuum science and technology1998，16，1：	1
12	Screen Printed Carbon Nanotube Field Emitter Array for Lighting Source Application显示文摘	Park JH Son GH Moon JS	2005	Journal of Vacuum Science & Technology B2005，23，2：	1
13	Wide dynamic range silicon diaphragm vacuum sens-or by electrostatic servo system显示文摘	MIYASHITA H ESASHI M	2000	Journal of Vacuum Science & Technology2000，18，6：	1
14	Carrier Densities in InAs/Ga(Al)Sb(As) Quantum Wells显示文摘	Munekata H Esaki L Chang LL	1987	Journal of Vacuum Science and Technology B1987，5，3：	1
15	Cu/Pi and Cu/PET adhesion:influence of Si^+ ion mixing显示文摘	GALUSKA A A	1992	Journal of Vacuum Science and Technology A1992，10，2：	1
16	Character- ization of amorphous carbon thin films 显示文摘	CAPANO M A SINGH R K QIAN F	1996	Journal of Vacuum Science and Technology A1996，14，2：	1
17	Microstructural features of EB-PVD thermal barrier coatings irradiated by high-intensity pulsed ion beam显示文摘	LIU Chen HAN Xiao-guang ZHU Xiao-peng LEI Ming-kai	2008	Journal of Vacuum Science and Technology A2008，26，6：	1
18	Mechanisms of copper removal during chemical mechanical polishing 显示文摘	Steigerwald J M Murarka S P Gutmann R J	1995	Journal of Vacuum Science and Technology B1995，13，6：	1
19	Investigation of temperature coefficient of resistance and crystallization of semiconducting YBaCuO thin films using pulsed laser annealing 显示文摘	YILDIZ A CELIK-BUTLER Z BUTLER D P	2002	J of Vacuum Science & Technology: B2002，20，2：	1
20	Performance characteristics of a dual focus X-ray alignment microscope 显示文摘	FELDMAN M LIU L PHANI S	1995	Journal of Vacuum Science & Technology: B1995，13，6：	1

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