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| 1 | High-aspect-ratio,ultrathick,negative-tone near-UV photoresist for MEMS applications显示文摘 | Lorenz H Despont M Fahrni N | 1998 | Sensors Actuators A1998，64，1： | 1 |
| 2 | Ultrahigh-density atomic force microscopy data storage with erase capability 显示文摘 | Binnig G Despont M Drechsler U | 1999 | Appl Phys Lett1999，74，9： | 1 |
| 3 | SU-8: a low-cost negative resist for MEMS显示文摘 | LORENZ H DESPONT M LABIANCA N | 1997 | Journal of Micromechanics and Microengineering1997，7，3： | 1 |
| 4 | VLSI-NEMS chip for AFM data storage显示文摘 | Brugger J Drechsler U | 2000 | Sensors and Actuators2000，80，2： | 1 |
| 5 | Low-cost PDMS seal ring for single-side wet etching of MEMS structures显示文摘 | Brugger J Beljakovic G Despont M | 1998 | Sens Actuators A1998，70，12： | 1 |
| 6 | High-aspect ration,ultrathick,negative-tone near-UV photoresist and its application for MEMS显示文摘 | Lorenz H Despont M Fahrni N | 1998 | Sensors and Actuators1998，64，： | 1 |
| 7 | High Aspect Ratio,Ultrathick,Negative-tone Near-UV Photoresist and Its Applications for MEMS显示文摘 | Lorenz H Despont M Fahrni N | 1998 | Sensors and Actuators A1998，64，： | 1 |
| 8 | SU-8: a low cost negative resist for MEMS显示文摘 | LORENZ H DESPONT M FAHRNI N | 1997 | Journal of Micromechanics and Microengineering1997，7，3： | 1 |
| 9 | Nanoscale three-dimensional patterning of molecular resists by scanning probes显示文摘 | PIRES D HEDRICK J L SILVA A D FROMMER J GOTSMANN B WOLF H DESPONT M DUERIG U and KNOLL A W | | 0，，： | 1 |
| 10 | High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS显示文摘 | Lorenz H Despont M Fahrni N | 1998 | Sensors and Actuators A1998，64，： | 1 |
| 11 | SU-8: A low-cost neg- ative resist for MEMS显示文摘 | Lorenz H Despont M Fahrni N | 1997 | Journal of Micromechanics and Mi- croengineering1997，7，3： | 1 |
| 12 | High-aspect-ratio, ul- trathick, negative-tone near-UV photoresist and its applications for MEMS显示文摘 | Lorenz H Despont M Fahrni N | 1998 | Sensors and Actuators A: Physical1998，64，1： | 1 |
| 13 | VLSI-NEMS chip for parallel AFM data storage 显示文摘 | Despont M Brugger J Drechsler U | 2000 | Sensors and Actuators A2000，80，2： | 1 |
| 14 | SU-8:A Low-Cost Negative Resist for MEMS显示文摘 | Lorenz H Despont M Fahrni N | 1997 | J Micromech Microeng1997，7，3： | 1 |
| 15 | The 'millipede' - nanotechnology entering data storage 显示文摘 | VETTIGER P CROSS G DESPONT M | 2002 | IEEE Transactions on Nanotechnology2002，1，1： | 1 |
| 16 | Wafer- scale micmdeviee transfer/interconnect: its application in an AFM -based data- storage system 显示文摘 | DESPONT M DRECHSLER U YU R | 2004 | Journal of Micmelectromechanical Systems2004，13，6： | 1 |
| 17 | High-aspect-ratio,ultrathick,negative-tone near-UV photoresist and its applications for MEMS显示文摘 | Lorenz H M Despont N Fahrni N | 1998 | Sensors and Actuators A1998，64，： | 1 |
| 18 | SU8:a low-cost negative resist for MEMS显示文摘 | LORENZ H DESPONT M LABIANCA N | 1997 | Mieromech Microeng1997，7，3： | 1 |
| 19 | SU-8: a low-cost negative resist for MEMS 显示文摘 | Lorenz H Despont M LaBianca N | 1997 | Journal of Micromechanics and Microengineering1997，7，3： | 1 |
| 20 | High-aspectratio, ultrathick, negative-tone near-UV PR and its applications for MEMS 显示文摘 | Lorenz H Despont M Fahrni M | 1998 | Sensors and Actuators A1998，64，1： | 1 |
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