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1Criteria for the growth of large-area adlayer-free monolayer graphene films by chemical vapor deposition显示文摘Homogeneity is important to material applications for good performance of individual devices,for making AB-stacked bilayer graphene in a layer-by-layer stacking order,and from the point of view of industrial production.Among many properties to be controlled,for the case of graphene,the thickness(or layer number)uniformity is the prerequisite.Chemical vapor deposition(CVD)of C precursors on Cu substrates is the most popular method to produce large-area graphene films.To date,precise control on the number of graphene layers as well as the uniformity over a large area is still very challenging.In this work,with a further understanding of the factors affecting adlayer growth,the synthesis of large-area adlayer-free monolayer graphene(MLG)films was achieved up to tens of squared centimeters in area by just using untreated Cu foil and a normal CVD process.We found that keeping equal C precursor concentration on the two sides of the Cu substrate is a criterion in addition to other factors such as the ratio of H:C and the substrate surface morphology for the growth of adlayer-free MLG.This finding is not only of great significance for the industrial production of large-area adlayer-free MLG films but also instructive for the synthesis of homogeneous few-layer graphene.Changqing Shen Xingzhou Yan Fangzhu Qing Xiaobin Niu Richard Stehle Samuel S.Mao Wanli Zhang Xuesong Li 2019Journal of Materiomics2019,5,3:2
2卷对卷化学气相沉积法制备石墨烯显示文摘批到批(B2B)和卷到卷(R2R)工艺均可用于石墨烯薄膜的大规模生产.由于设备简单,B2B工艺在实验室研究中非常普遍.相对而言,R2R工艺更容易自动化,并且与随后的转移过程更兼容,因此在工业上更受青睐.目前,对R2R工艺的研究主要集中在反应器设计或装料结构等方面,对石墨烯生长动力学缺乏深入的了解.本文通过研究石墨烯的生长演化过程,发现在相同的反应参数下,R2R工艺的石墨烯晶畴密度大于B2B工艺的石墨烯畴密度,其原因归结于两种工艺不同的反应过程;而通过延长反应时间,可以对石墨烯薄膜的缺陷进行修复.在优化的R2R工艺下,可以获得与常规B2B工艺相当的高质量石墨烯薄膜.本工作可促进石墨烯薄膜制备技术的发展.梁明昊 钱凌轩 侯雨婷 李俊 沈长青 青芳竹 李雪松 2022Science China Materials2022,65,4:0
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