Modeling and optimal design of multilayer thermal cantilever microactuators

查看全文 作　　者：FU [1]JianYu;CHEN [1]DaPeng;YE [1]TianChun;JIAO [1]BinBin;OU [1]Yi

机构地区：[1]Silicon Device and Integration Technology Department,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China

出　　处：《Science China(Technological Sciences)》索引2009年第52卷第5期,共4页

基　　金：Supported by the National Natural Science Foundation of China (Grant No. 60576053);Hi-Tech Research and Development Program of China (Grant No. 2007AA03Z333) 摘　　要：A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived.The sim-plified expression received from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters.Experiment is performed,the modeled and experimental results demonstrate the validity of the model,and it also indicates that Young's module makes great contribution to the deflection;therefore,thin layers cannot be ignored arbitrarily. 关键词：THERMAL MICROACTUATOR TIP DEFLECTION MULTILAYER model optimization

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Modeling and optimal design of multilayer thermal cantilever microactuators

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