Fabrication and characterization of rugate structures composed of SiO_2 and Nb_2O_5

查看全文 作　　者：R. [1]Leitel;O. [1]Stenzel;S. Wilbrandt [1]1;D. G[1]bler;V. [1]Janicki;N. [1]Kaiser

机构地区：[1]Institut für Angewandte Physik,Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743 Jena, Germany,Optical Coatings Department, Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Str. 7, D-07745 Jena, Germany,Optical Coatings Department, Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Str. 7, D-07745 Jena, Germany,Institute Ruder Boskovic, Bijenicka 54, 10000 Zagreb, Croatia,Optical Coatings Department, Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Str. 7, D-07745 Jena, Germany

出　　处：《光学精密工程》索引2005年第13卷第4期,共7页

摘　　要：Gradient index layers and rugate structures were fabricated on a Leybold Syrus pro deposition system by plasma-assisted coevaporation of the low index material silica and the high index material niobium pentoxide. To obtain information about the compositional profiles of the produced layers, cross sectional transmission electron microscopy was used in assistance to deposition rate data recorded by two independent crystal monitors during the film preparation. The depth dependent concentration profiles were transformed to refractive index gradients by means of effective medium approximation. Based on the refractive index gradients the corresponding samples` transmission and reflection spectra could be calculated by utilizing matrix formalism. The relevance of the established refractive index profiles could be verified by comparison of the calculated spectra with the measured ones. 关键词：SIO2 NB2O5 防反射涂层光学薄膜光谱分析光电器件 SLD 剩余模态反射率超发光二极管

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Fabrication and characterization of rugate structures composed of SiO_2 and Nb_2O_5

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