Withdrawal Weighting Image-Impedance Connected SAW Filters with Al-Mo Alloy Electrodes

查看全文 作　　者：Dongmei [1,2]Li;Xubo [1]Wang;Feng [1]Pan

机构地区：[1]Laboratory of Advanced Materials, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China;[2]College of Chemistry and Chemical Engineering, Xinjiang University, Wulumuqi 830046, China

出　　处：《稀有金属材料与工程》索引2006年第35卷第A03期,共2页

摘　　要：To obtain high reliability of surface acoustic wave(SAW)devices,Mo was added to Al electrodes on 128°Y-X LiNbO_3 substrates by a d.c.magnetron sputtering deposition.Influence of Mo additive on the mechanical properties of Al films was investigated.It was found that the Al-Mo alloy films displayed a superior adhesion to substrates.With the Al-Mo alloy films,a 1.65 GHz-range image-impedance connected SAW filter was designed and fabricated.In this structure of SAW filter, for satisfying stopband requirements a dual-track structure was applied.Withdrawal weighting of interdigital transducers(IDT) was used to adjust the bandwidth of SAW filter. 关键词：Al-Mo films ADHESION surface acoustic wave

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Withdrawal Weighting Image-Impedance Connected SAW Filters with Al-Mo Alloy Electrodes

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