Periodic surface structures fabricated by one excimer laser pulse through a silica phase mask grating

查看全文 作　　者：Luo, [1]GP;Wu, [1]HM;Wang, [1]M;Zhu, [1]SN;Lu, [1]YQ;Liu, [1]ZG;Wei, [1]Y;Ming, [1]NB 机构地区：[1]Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China 出　　处：《Chinese Science Bulletin》索引1997年第42卷第21期,共6页 摘　　要：RECENTLY, excimer laser devices, which have higher-energy density output in pulsed ultravio-let (UV) light (193 or 248 nm), have been employed to generate some thin film struc-tures. The principle of this technique, which is also called pulsed laser deposition (PLD)technique, is that the exposed material could be ablated out of the sample by the focusing laserbeam, and redeposit on a substrate to form thin-film structures under certain conditions. Onthe other hand, researchers have obtained high-quality Bragg gratings in photosensitive 关 键 词：EXCIMER laser pulse phase MASK GRATING PERIODIC surface structures.