Influence of vacuum annealing and irradiation on magnetic properties of Fe-3% Y_2O_3 films

查看全文 作　　者：LI Zhengcao YU Xiaoyi MIAO Wei ZHANG [1]Zhengjun 机构地区：[1]State Key Laboratory of New Ceramic and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China 出　　处：《Rare Metals》索引2011年第30卷第5期,共5页 基　　金：support by the National Natural Science Foundation of China (No. 61076003);the National Basic Research and Development Program of China (Nos. 2010CB731600 and 2010CB832900) 摘　　要：Yttria (Y) dispersed ferrum (Fe) films were prepared by a double-target magnetron co-sputtering method. Vacuum annealing and xenon ion irradiation were conducted to investigate the influence on the magnetic and mechanical properties of the films. The crystal grain growth mechanism and second phase precipitation mechanism were conducted simultaneously in the vacuum annealing process. These two effects led to an opposite variation of nano-hardness and coercivity in the films. Xenon ion irradiation played a role in rapid annealing, which also affected the magnetic performance of the yttria dispersed ferrum films. 关 键 词：真空退火 磁学性质 薄膜 氙离子辐照 FE 辐射 生长机制 磁控共溅射