Structure and magneto-electrical properties of Fe-C films prepared by magnetron sputtering

查看全文 作　　者：MA [1,2]Lei;LIU [1]ZhongWu;ZENG [1]DeChang;YU [1]HongYa;ZHONG [1]XiaPing;ZHANG [3]XiaoZhong

机构地区：[1]School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China;[2]School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, China;[3]Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

出　　处：《Science China(Physics,Mechanics & Astronomy)》索引2012年第55卷第9期,共5页

基　　金：supported by the National Natural Science Foundation of China (Grant No. U0734001);the Fundamental Research Funds for the Central Universities,SCUT (Grant Nos. 2009ZM0247 and 2012ZZ0015) 摘　　要：Fe-doped amorphous Fe x C 1 x granular films were prepared on n-Si(100) substrates by d.c.magnetron sputtering.The structural properties of Fe x C 1 x films were investigated by X-ray diffraction(XRD),atomic force microscope(AFM) and Raman spectroscopy.The results show that the iron and carbon of as-deposited films are in amorphous state,and the Fe x C 1 x films are diamond-like carbon(DLC) films.After doping iron into the DLC films,a smooth surface morphology of the Fe x C 1 x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%.The Fe x C 1 x films have good soft magnetic properties with the coercivity of approximately 20 Oe.A high positive magnetoresistance(MR) up to 93% with x=1at% was observed in a Fe x C 1 x granular film at 300 K.The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory. 关键词：所有制结构 FE-C 磁控溅射电性能薄膜 SI(100) 拉曼光谱分析原子力显微镜

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Structure and magneto-electrical properties of Fe-C films prepared by magnetron sputtering

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