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Research on the surface passivation of nanostructure-textured crystalline silicon solar cell

查看全文 作  者:DOU [1]BingFei;JIA [1]Rui;LI [1]HaoFeng;CHEN [1]Chen;MENG [1]YanLong;LIU [1]XinYu;YE [1]TianChun 高影响力作者 机构地区:[1]Institute of Microelectronics,Chinese Academy of Sciences高影响力机构 出  处:《Science China(Technological Sciences)》索引2013年第56卷第1期,共5页高影响力期刊 基  金:supported by the National Basic Research Program of China ('973' Project)(Grant No. 2009CB939703);the National Natural Science Foundation of China (Grant Nos. 11104319,51172268);the Chinese Academy of Solar Energy Action Plan 摘  要:Nanostructure-textured solar cell owns unique properties but has some shortages especially in its fabrication and passivation.In this paper,nanostructures for crystalline silicon solar cell have been synthesized by controllable method based on silver catalyzed chemical etching.In this way,only the front surface of cell is etched and rear surface is protected.It was found that cells textured via the new method obtained equally excellent optical while superior electrical properties compared with those textured via traditional HF/AgNO3 etching.The V OC and I SC of the cell were improved by 6% and 11%,respectively.Then the cells were passivated via a bi-layer passivation(SiO2 & SiN x),in contrast to traditional SiN x passivation.It was also found that cells with new passivation exhibited improved V OC and I SC by 4% and 25%,respectively.The encouraging results can provide fundamental data for developing the nanostructure-textured crystalline silicon solar cell in following researches. 关 键 词:晶体硅太阳能电池 纳米结构 钝化 表面 纹理 化学蚀刻 基础数据 二氧化硅
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