Layer-by-Layer Analysis of the Composition of Thin Films by SIMS and Raman Spectroscopy

查看全文 作　　者：Nikolay N. Nikitenkovt A. N. Nikitenkov Yu. I. Turin I. V. Dushkin V. S. Sypchenko O. V. [1]Vilhivskaya 机构地区：[1]Institute of Physics and Technology, National Research Tomsk Polytechnic University, Tomsk 63405, Russia 出　　处：《Journal of Chemistry and Chemical Engineering》索引2014年第8卷第2期,共4页 关 键 词：拉曼光谱 SIMS 化学组成 薄膜 磁控溅射 氢扩散 纳米晶体 质谱法