Microstructure and mechanical properties of Ti Al Si N nano-composite coatings deposited by ion beam assisted deposition

查看全文 作　　者：SU [1]Kang;LIU [1]DaMeng;SHAO [1]TianMin

机构地区：[1]State Key Laboratory of Tribology, Tsinghua University

出　　处：《Science China(Technological Sciences)》索引2015年第58卷第10期,共7页

基　　金：supported by the National Natural Science Foundation of China(Grant No.51105222);the State Key Basic Research Program of China(Grant No.2012CB934101);the Science Fund of the State Key Laboratory of Tribology at Tsinghua University SKLT12A01;Beijing Research Program(Grant No.100322002) 摘　　要：TiAlSiN nano-composite coatings with Silicon contents from 4.1 to 23.9 at.% were deposited on Silicon wafers. The nanohardness, microstructure, and adhesion force of the coatings were deeply affected by Silicon contents. The TiAlSiN with 9.0 at.% Silicon has a maximum hardness of 40.9 GPa, a highest adhesion force of 67 N and a lowest friction coefficient of 0.5. Microstructures show that Silicon doping increases the hardness of coating due to solid solution hardening effect and grain boundary enhancement effect. The amorphous Si3N4 matrix, which contains(Ti,Al)N nano-crystals, is formed as the Silicon content is increased. The matrix contributes to the nano-hardness and helps to resist surface oxidization. Especially, the matrix induces low surface roughness and decreases the friction coefficient. 关键词：离子束辅助沉积纳米复合涂层组织性能纳米硬度摩擦系数非晶氮化硅表面粗糙度硅含量

相关文献

参考文献（50）
引证文献（12）
耦合文献（15）

参考文献(50)

引证文献(12)

耦合文献(15)

互联网出版许可证新出网证(渝)字10号全国400电话 - 免长途话费

Microstructure and mechanical properties of Ti Al Si N nano-composite coatings deposited by ion beam assisted deposition

参考文献(50)

引证文献(12)

耦合文献(15)

用户提示