High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization

查看全文 作　　者：Samuel [1]S.Mao;Xiaojun [1]Zhang

机构地区：[1]Department of Mechanical Engineering, University of California at Berkeley

出　　处：《Engineering》索引2015年第1卷第3期,共5页

基　　金：partially supported by the US Department of Energy 摘　　要：A high-throughput multi-plume pulsed-laser deposition(MPPLD) system has been demonstrated and compared to previous techniques. Whereas most com binatorial pulsedlaser deposition(PLD) systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-fllm fabrication. 关键词：脉冲激光沉积优化材料羽流化合物库沉积速率薄膜制备高通量

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High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization

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