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A review of the scalable nano-manufacturing technology for flexible devices

查看全文 作  者:Wenbin [1]HUANG;Xingtao [2]YU;Yanhua [1]LIU;Wen [1]QIAO;Linsen [1]CHEN 高影响力作者 机构地区:[1]College of Physics, Optoelectronics and Energy & CollaborativeInnovation Center of Suzhou Nano Science and Technology, SoochowUniversity, Suzhou 215006, China; Key Lab of Advanced OpticalManufacturing Technologies of Jiangsu Province & Key Lab of ModemOptical Technologies of Education Ministry of China, SoochowUniversitv. Suzhou 215006. China;[2]College of Physics, Optoelectronics and Energy & CollaborativeInnovation Center of Suzhou Nano Science and Technology, SoochowUniversity, Suzhou 215006, China高影响力机构 出  处:《Frontiers of Mechanical Engineering》索引2017年第12卷第1期,共11页高影响力期刊 基  金:Acknowledgements The authors acknowledge financial support given by the National Natural Science Foundation of China (Grant Nos. 91323303, 61401292, 61405133, 61505131, and 61575135), the Jiangsu Science andTechnology Department (Grant Nos. BK20140350, BK20140348, and BK20150309), the Specialized Research Fund for the Doctoral Program of Higher Education (Grant No. 20133201120027), the China Postdoctoral Science Foundation (Grant No. 2015M571816), and the project of the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions. 关 键 词:纳米制造技术 光子器件 可扩展性 综述 柔性 发光二极管 人工皮肤 光刻工艺
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