An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators

查看全文 作　　者：Feng [1]Zhu;Yuxing [1]Zhang;Bin [1]Wang;Zhenghua [1]Qian

机构地区：[1]State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing Uniuersity of Aeronautics and Astronautics, Nanjing 210016, China

出　　处：《Acta Mechanica Solida Sinica》索引2017年第30卷第3期,共8页

基　　金：supported by the National Natural Science Foundation of China (Nos. 11502108, 11232007, 51405225);the Natural Science Foundation of Jiangsu Province (Nos. BK20140037, BK20140808);the Fundamental Research Funds for Central Universities (No. NE2013101);the Program for New Century Excellent Talents in Universities (No. NCET-12-0625);a project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD) 摘　　要：Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator(FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model(often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR. 关键词：压电层状结构石英谐振器电极模型波传播体声波弹性薄膜 relation

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An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators

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