[Y(dbm)_(3)(H_(2)O)]:Synthesis,thermal behavior and spin-coating precursor for Y_(2)O_(3)layer formation

查看全文 作　　者：Elaheh [1]Pousaneh;Andrea [1]Preuβ;Khaybar [1]Assim;Julian [1]Noll;Alexander [1]Jakob;Tobias [1]Rüffer;Heinrich [1]Lang 机构地区：[1]Technische Universitat Chemnitz,Faculty of Natural Sciences,Institute of Chemistry,Inorganic Chemistry 出　　处：《Journal of Rare Earths》索引2017年第35卷第12期,共7页 基　　金：Project supported by the German Research Foundation(Cluster of Excellence Center for Advancing Electronics Dresden(cfaed);partially performed within the Federal Cluster of Excellence EXC 1075 MERGE Technologies for Multifunctional Lightweight Structures 摘　　要：The synthesis,structure and thermal behavior of [Y(dbm)_3(H_2 O)](3)(dbm = 1,3-diphenyl-1,3-propandionate) and its use as a spin-coating precursor for Y_2 O_3 deposition is reported. Complex 3 was prepared by the reaction of [Y(NO_3)_3·6 H_2 O](1) with 3 equiv of Hdbm(2) in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C_1 symmetric crystallographically independent species of 3 possess a YO7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry(∧ enantiomer). Complex 3 forms a1 D chain, due to intermolecular hydrogen bonds between the coordinated H_2 O molecule and the 0 atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40-800 ℃ and 40-1300 ℃ under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction(PXRD) measurements of the residues confirmed the formation of Y_2 O_3. Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SiO_2 film, or with a native oxide layer.The as-deposited Y_2 O_3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively. 关 键 词：YTTRIUM β-Diketonate Yttrium oxide SPIN-COATING Solid-state structure Vapor pressure