A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

查看全文 作　　者：Guido [1]Straube;Juan Sebastian Fischer [1]Calderon;Ingo [1]Ortlepp;Roland [1]FuBl;Eberhard [1]Manske

机构地区：[1]Technische Universitat Ilmenau,EhrenbergstraBe 29,98693 Ilmenau,Germany

出　　处：《Nanomanufacturing and Metrology》索引2021年第4卷第3期,共8页

基　　金：funded by the Deutsche Forschungsgemeinschaft(DFG)under contract 279458870. 摘　　要：As standard concepts for precision positioning within a machine reach their limits with increasing measurement volumes,inverse concepts are a promising approach for addressing this problem.The inverse principle entails other limitations,as for high-precision positioning of a sensor head within a large measurement volume,three four-beam interferometers are required in order to measure all necessary translations and rotations of the sensor head and reconstruct the topography of the reference system consisting of fixed mirrors in the x-,y-,and z-directions.We present the principle of a passive heterodyne laser interferometer with consequently separated beam paths for the individual heterodyne frequencies.The beam path design is illustrated and described,as well as the design of the signal-processing and evaluation algorithm,which is implemented using a System-On-a-Chip with an integrated FPGA,CPU,and A/D converters.A streamlined bench-top optical assembly was set up and measurements were carried out to investigate the remaining non-linearities.Additionally,reference measurements with a commercial homodyne interferometer were executed. 关键词：Heterodyne laser interferometer He-Ne laser Optical fiber coupling Beat frequency NON-LINEARITIES

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A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

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