维普中文期刊产品整合服务

Diamond semiconductor and elastic strain engineering

查看全文 作  者:Chaoqun [1]Dang;Anliang [1]Lu;Heyi [1]Wang;Hongti [2]Zhang;Yang [1,3,4]Lu 高影响力作者 机构地区:[1]Department of Mechanical Engineering,City University of Hong Kong,Hong Kong,China;[2]School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China;[3]Department of Materials Science and Engineering,City University of Hong Kong,Hong Kong,China;[4]Nano-Manufacturing Laboratory(NML),Shenzhen Research Institute of City University of Hong Kong,Shenzhen 518057,China高影响力机构 出  处:《Journal of Semiconductors》索引2022年第43卷第2期,共12页高影响力期刊 基  金:the support from the Research Grants Council of the Hong Kong Special Administrative Region,China(Grant RFS2021-1S05);the National Natural Science Foundation of China(Grant 11922215);the funding from the National Natural Science Foundation of China(Grant 11902200);the Science and Technology Commission of Shanghai Municipality(Grant19YF1433600)。 摘  要:Diamond,as an ultra-wide bandgap semiconductor,has become a promising candidate for next-generation microelec-tronics and optoelectronics due to its numerous advantages over conventional semiconductors,including ultrahigh carrier mo-bility and thermal conductivity,low thermal expansion coefficient,and ultra-high breakdown voltage,etc.Despite these ex-traordinary properties,diamond also faces various challenges before being practically used in the semiconductor industry.This review begins with a brief summary of previous efforts to model and construct diamond-based high-voltage switching diodes,high-power/high-frequency field-effect transistors,MEMS/NEMS,and devices operating at high temperatures.Following that,we will discuss recent developments to address scalable diamond device applications,emphasizing the synthesis of large-area,high-quality CVD diamond films and difficulties in diamond doping.Lastly,we show potential solutions to modulate diamond’s electronic properties by the“elastic strain engineering”strategy,which sheds light on the future development of diamond-based electronics,photonics and quantum systems. 关 键 词:DIAMOND OPTOELECTRONICS power electronics nanomechanics elastic strain engineering
相关文献

参考文献(157)

引证文献(4)

网站首页 | 关于我们 | 联系我们 | 产品服务 | 客服中心 | 广告服务 | 版权声明 | 网站联盟 | 友情链接 | 售卡网点

版权所有© 渝B2-20050021-1 渝公网安备 50019002500403号 违法和不良信息举报中心

互联网出版许可证 新出网证(渝)字10号 全国400电话 - 免长途话费