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Strategy to minimize bending strain interference for flexible acoustic wave sensing platform

查看全文 作　　者：Jian [1]Zhou;Zhangbin [1]Ji;Yihao [1]Guo;Yanghui [1]Liu;Fengling [1]Zhuo;Yuanjin [2]Zheng;Yuandong(Alex)[3]Gu;YongQing [4]Fu;Huigao [1,5]Duan 高影响力作者 机构地区：[1]College of Mechanical and Vehicle Engineering,Hunan University,Changsha 410082,China;[2]School of Electrical and Electronical Engineering,Nanyang Technological University,Singapore 639798,Singapore;[3]Shanghai IndustrialμTechnology Research Institute(SITRI),235 Chengbei Rd,Shanghai 201800,China;[4]Faculty of Engineering and Environment,Northumbria University,Newcastle upon Tyne NE18ST,United Kingdom;[5]Greater Bay Area Institute for Innovation,Hunan University,Guangzhou 511300,China高影响力机构 出　　处：《npj Flexible Electronics》索引2022年第6卷第1期,共9页高影响力期刊 基　　金：supported by the Excellent Youth Fund of Hunan Province (2021JJ20018);the NSFC (No.52075162);the Program of New and High-tech Industry of Hunan Province (2020GK2015,2021GK4014);the Joint Fund Project of the Ministry of Education;the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1);International Exchange Grant (IEC/NSFC/201078)through Royal Society and the NSFC. 摘　　要：There are great concerns for sensing using flexible acoustic wave sensors and lab-on-a-chip,as mechanical strains will dramatically change the sensing signals(e.g.,frequency)when they are bent during measurements.These strain-induced signal changes cannot be easily separated from those of real sensing signals(e.g.,humidity,ultraviolet,or gas/biological molecules).Herein,we proposed a new strategy to minimize/eliminate the effects of mechanical bending strains by optimizing off-axis angles between the direction of bending deformation and propagation of acoustic waves on curved surfaces of layered piezoelectric film/flexible glass structure.This strategy has theoretically been proved by optimization of bending designs of off-axis angles and acoustically elastic effect.Proof-of-concept for humidity and ultraviolet-light sensing using flexible SAW devices with negligible interferences are achieved within a wide range of bending strains.This work provides the best solution for achieving high-performance flexible acoustic wave sensors under deformed/bending conditions. 关 键 词：BENDING WAVE humidity
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