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Direct fabrication of flexible tensile sensors enabled by polariton energy transfer based on graphene nanosheet films

查看全文 作　　者：Xi [1]Zhang;Junchi [1]Ma;Wenhao [1]Huang;Jichen [1]Zhang;Chaoyang [1]Lyu;Yu [1]Zhang;Bo [1,2]Wen;Xin [2]Wang;Jing [3]Ye;Dongfeng [1]Diao 高影响力作者 机构地区：[1]College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen 518060,China;[2]Research Center of Medical Plasma Technology,Shenzhen University,Shenzhen 518060,China;[3]Shenzhen Milebot Robotics Co.,Ltd.,Shenzhen 518060,China高影响力机构 出　　处：《Nanotechnology and Precision Engineering》索引2023年第6卷第1期,共11页高影响力期刊 基　　金：support of the National Natural Science Foundation of China(Grant Nos.52275565,NSFC-JSPS:52011540005,and 62104155);the Natural Science Foundation of Guangdong Province(Grant No.2022A1515011667);the Guangdong Kangyi Special Fund(Grant No.2020KZDZX1173). 摘　　要：A fundamental problem in the direct manufacturing of flexible devices is the low melting temperature of flexible substrates,which hinders the development of flexible electronics.Proposed here is an electron-cyclotron-resonance sputtering system that can batch-fabricate devices directly on flexible substrates under a low temperature by virtue of the polariton energy transfer between the plasma and the material.Flexible graphene nanosheet-embedded carbon(F-GNEC)films are manufactured directly on polyimide,polyethylene terephthalate,and polydimethylsiloxane,and how the substrate bias(electron energy),microwave power(plasma flux and energy),and magnetic field(electron flux)affect the nanostructure of the F-GNEC films is investigated,indicating that electron energy and flux contribute to the formation of standing graphene nanosheets in the film.The films have good uniformity of distribution in a large size(17 mm×17 mm),and tensile and angle sensors with a high gauge factor(0.92)and fast response(50 ms)for a machine hand are obtained by virtue of the unique nanostructure of the F-GNEC film.This work sheds light on the quantum manufacturing of carbon sensors and its applications for intelligent machine hands and virtual-reality technology. 关 键 词：Direct flexible fabrication Graphene nanosheets film Polariton energy transfer Flexible sensor Quantum manufacturing
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