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Chip-integrated metasurface full-Stokes polarimetric imaging sensor

查看全文 作　　者：Jiawei [1,2]Zuo;Jing [1,2]Bai;Shinhyuk [1,2]Choi;Ali [1,2]Basiri;Xiahui [1,2]Chen;Chao [1,2,3]Wang;Yu [1,2]Yao 高影响力作者 机构地区：[1]School of Electrical,Computer and Energy Engineering,Arizona State University,85281,Tempe,AZ,USA;[2]Center for Photonic Innovation,Arizona State University,85281 Tempe,AZ,USA;[3]Biodesign Center for Molecular Design and Biomimetics,Arizona State University,85281 Tempe,AZ,USA高影响力机构 出　　处：《Light(Science & Applications)》索引2023年第12卷第10期,共14页高影响力期刊 基　　金：supported in part by NSF under Grant No.2048230 and 1809997;DOE under Grant No.DE-EE0008999;Device fabrication and characterization in the Center for Solid State Electronics Research(CSSER);LeRoy Eyring Center for Solid State Science(LE-CSSS)at Arizona State University was supported,in part,by NSF contract ECCS-1542160. 摘　　要：Polarimetric imaging has a wide range of applications for uncovering features invisible to human eyes and conventional imaging sensors.Chip-integrated,fast,cost-effective,and accurate full-Stokes polarimetric imaging sensors are highly desirable in many applications,which,however,remain elusive due to fundamental material limitations.Here we present a chip-integrated Metasurface-based Full-Stokes Polarimetric Imaging sensor(MetaPolarIm)realized by integrating an ultrathin(~600 nm)metasurface polarization filter array(MPFA)onto a visible imaging sensor with CMOS compatible fabrication processes.The MPFA is featured with broadband dielectric-metal hybrid chiral metasurfaces and double-layer nanograting polarizers.This chip-integrated polarimetric imaging sensor enables single-shot full-Stokes imaging(speed limited by the CMOS imager)with the most compact form factor,records high measurement accuracy,dual-color operation(green and red)and a field of view up to 40 degrees.MetaPolarIm holds great promise to enable transformative applications in autonomous vision,industry inspection,space exploration,medical imaging and diagnosis. 关 键 词：STOKES POLAR enable
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