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51篇 您的检索式：期刊名="IEEE Journal of microelectromechanical systems"

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	题名	作者	年代	出处	被引量
1	A high sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages 显示文摘	Dokmeci M Najafi K	2001	IEEE/ASME Journal of Microelectromechanical Systems2001，10，：	1
2	Stroboscopic interferometer system for dynamic MEMS characterization显示文摘	M R Hart R A Conant K Y Lau	2000	IEEE/ASME Journal of Microelectromechanical Systems2000，9，4：	1
3	Measurement system for full three-dimensional motion characterization of MEMS显示文摘	Rembe C Muller R S	2002	IEEE Journal of microelectromechanical systems2002，11，5：	1
4	Error sources in in-plane silicon tuning-fork MEMS gyroscopes 显示文摘	WEINBERG M KOUREPENIS A	2006	IEEE/ASME Journal of Microelectromechanical Systems2006，15，：	1
5	Inherently robust micromaehined gyro- scopes with 2-DOF sense-mode oscillator 显示文摘	ACAR C SHKEL A	2006	IEEE/ASME Journal of Microelectromechanical Systems2006，15，2：	1
6	Measurement of the thermal conductivity anisotropy in polyimide films 显示文摘	Kurabayashi Ktasuo Touzelbaev Maxat Goodson Kenneth E	1999	IEEE Journal of Microelectromechanical systems1999，8，2：	1
7	A self-retracting fully compliant bistable micromechanism显示文摘	MASTERS N D HOWELL L L	2003	IEEE Journal of Microelectromechanical Systems2003，12，3：	1
8	Piezoresistive accelermeters for MCM package显示文摘	Plaza J A Ana C Enric C	2002	IEEE Journal of Microelectromechanical Systems2002，11，6：	1
9	A single-crystal silicon symmetrical and decouple MEMS gyroscope on an insulating substrate显示文摘	Said Emre Alper Tayfun Akin	2005	IEEE Journal of microelectromechanical systems2005，，：	1
10	Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers 显示文摘	Jin X C Ladabaum I Levent Degertekin F	1999	IEEE Journal of Microelectromechanical Systems1999，8，1：	1
11	David denniston and chuck goldsmith,micromachined low-loss microwave switches显示文摘	Chen Shea Eshelman S	1999	IEEE Journal of Microelectromechanical Systems1999，8，2：	1
12	A High-Power Temperature-Stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-Beam Design显示文摘	Mahameed R Rebeiz G M	2010	IEEE Journal of Microelectromechanical Systems2010，19，4：	1
13	Stroboscopic interferometer system for dynamic MEMS characterization 显示文摘	Conant R A Lau K Y	2000	IEEE/ASME Journal of Microelectromechanical Systems2000，9，4：	1
14	An electrostatic zigzag transmissive microoptical switch for MEMS displays 显示文摘	WANG K SINCLAIR M GARY K	2007	IEEE/ASME Journal of Microelectromechanical Systems2007，16，1：	1
15	Sacrificial layer process with laser-driven release for batch assembly operation 显示文摘	Holmes A S Saidarn S M	1998	IEEE Journal of Microelectromechanical Systems1998，7，4：	1
16	Micromachined low-loss microwave switches 显示文摘	Yao Z J Chen Shea Eshelman S	1999	IEEE Journal of Microelectromechanical Systems1999，8，2：	1
17	Performance of a 7 -mm microfabricated car显示文摘	Watanabe M Kawahara N	1995	IEEE/ASME Journal of Microelectromechanical Systems1995，4，2：	1
18	A Reduced-Order Model for Electrically Actuated Microbeam-Based MEMS 显示文摘	Younis M I Abdel-Rahman E M Nayfeh A	2003	IEEE Journal of Microelectromechanical Systems2003，5，：	1
19	Pull-In Study of an Electrostatic Torsion Microactuator显示文摘	Degani O Socher E Lipson A	1998	IEEE Journal of Microelectromechanical Systems1998，7，4：	1
20	An Angle-Based Design Approach for Rectangular Electrostatic Torsion Actuators显示文摘	Xiao Z X Wu X T Peng W Y	2001	IEEE Journal of Microelectromechanical Systems2001，10，4：	1

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