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22篇 您的检索式：期刊名="J Micromechanical Microengineering"

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	题名	作者	年代	出处	被引量
1	A novel 2D dynamic cellular automata model for photoresist etching process simulation显示文摘	Zhou Z-F Huang Q-A Li W-H	2005	J Micromechanics and Microengineering2005，15，3：	1
2	Systematic mask synthesis for surface micromachined microelectromechanical systems 显示文摘	ANANTHAKRISHNAN V SARMA R ANATHASURESH G K	2003	J Micromechan and Microengineer2003，13，6：	1
3	Fabrication of two dimensional arrays of microlenses and their applica tions in photolithography 显示文摘	WHITESIDES G M	2002	J of Micromechanics and Microengineering2002，12，6：	1
4	Fabrication of micronozzles using low-temperature wafer-level bonding with SU-8 显示文摘	LI S FREIDHOFF C B YOUNG R M	2003	J of Micromechanics and Microengineering2003，13，5：	1
5	Fluorinated polyimide fabrication by magnetically controlled reactive ion etching (MC RIE)显示文摘	FURUYA A SHIMOKAWA F MATSUURA T	1994	J Micromechanics and Microengineering1994，4，2：	1
6	Silicon dioxide sacrificial layer etching in surface micromachining 显示文摘	BUHLER J STEINER F P BALTES H	1997	J of Micromechanics and Microengineering1997，7，1：	1
7	A Comprehensive Model to Predict the Charging and Reliability of Capacitive RF MEMS Switches显示文摘	van Spengen W M Puers R Mertens R	2004	J Micromechanics and Microengineering2004，14，4：	1
8	Fabrication of microstructures for integrated sensors on GaAs显示文摘	FRICKE K WURF J MIAO J	1993	J of Micromechanics and Microengineering1993，3，：	1
9	An energy-based design criterion for magnetic microactuators显示文摘	NAMI Z AHN C H ALLEN M G	1996	J of Micromechanics and Microengineering1996，6，3：	1
10	A passive planar mieromixer with obstructions for mixing at low Reynolds numbers 显示文摘	BHAGAT A A S PETERSON E T K PAPAUTSKY I	2007	J of Micromechanics and Microengineering2007，17，5：	1
11	Su- 8 : A low cost negative resist for MEMS显示文摘	Lorenz H Despont M	1997	J Micromechanics and Microengineering1997，7，3：	1
12	Nonlinear dynamic modelling of MEMS components via the Cosserat rod element approach 显示文摘	Cao D Q Liu D Wang C H T	2005	J Micromechanics and Microengineering2005，15，：	1
13	A GaAs pressure sensor based on resonant tunneling diodes显示文摘	FOBELETS K VOUNCKX R BORGHS G	1994	J of Micromechanics and Microengineering1994，4，：	1
14	Review on micro molding of thermoplastic polymers 显示文摘	Heckele M Schomburg W K	2004	J Micromechanics and Microengineering2004，14，3：	1
15	Composition and structure of NiTiCu shape memory thin films显示文摘	BOSSEBOEUF A ELISABETH D G	2000	J Micromechanical Microengineering2000，10，：	1
16	Force feedback lin- earization for higher-order electromeehanical sigma-delta modulators 显示文摘	DONG Y KRAFY M Wt-IITE W R	2006	J Micromechanics and Microengineering2006，16，：	1
17	Micromixers: a review 显示文摘	NGUYEN N T WU Z	2005	J of Micromechanics and Microengineering2005，15，2：	1
18	A novel large displacement electrostatic actuator: pre-stress comb-drive actuator 显示文摘	CHIOU J C LIN Y J	2005	J of Micromechanics and Microengineering2005，15，9：	1
19	Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures显示文摘	BAO M H YANG H SUN Y C	2003	J Micromechanics and Microengineering2003，13，：	1
20	Micromachine-based multi-channel flow cytometers for cell/particle counting and sorting 显示文摘	LEE G B LIN C H CHANG S C	2005	J Micromechanics and Microengineering2005，15，3：	1

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