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1篇 您的检索式：作者名="Dianqiang Yu"

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		题名	作者	年代	出处	被引量
	1	Machine learning powered ellipsometry显示文摘Ellipsometry is a powerful method for determining both the optical constants and thickness of thin films.For decades,solutions to ill-posed inverse ellipsometric problems require substantial human-expert intervention and have become essentially human-in-the-loop trial-and-error processes that are not only tedious and time-consuming but also limit the applicability of ellipsometry.Here,we demonstrate a machine learning based approach for solving ellipsometric problems in an unambiguous and fully automatic manner while showing superior performance.The proposed approach is experimentally validated by using a broad range of films covering categories of metals,semiconductors,and dielectrics.This method is compatible with existing ellipsometers and paves the way for realizing the automatic,rapid,high-throughput optical characterization of films.	Jinchao Liu Di Zhang Dianqiang Yu Mengxin Ren Jingjun Xu	2021	Light(Science & Applications)2021，10，4：	1

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