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52篇 您的检索式：作者名="EHRFELD W"

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	题名	作者	年代	出处	被引量
1	Electrochemistry and Microsystems显示文摘	W G Ehrfeld		0，，20：	1
2	Microsystern technology: between research and industrial application显示文摘	EHRFELD W HESSEL V	1998	Microelectronic Engineering1998，4142，：	1
3	Micro electro discharge machining as a technology in micromachining 显示文摘	Ehrfeld W	1996	Proceedings of the SPIE-The International Society for Optical Engineering1996，，2879：	1
4	Characterization of mixing in micromixers by a test reaction: single mixing units and mixer arrays显示文摘	Ehrfeld W Golbig K Hessel V	1999	Ind Eng Chem Res1999，，38：	1
5	Electrochemistry and Microsysterms显示文摘	Ehrfeld W	2003	Elec- trochimica Acta2003，48，2022：	1
6	Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography,galvanoforming,and plastic moulding (LIGA process)显示文摘	BECKER E W EHRFELD W HAGMANN P	1986	Microelectronic Engineering1986，4，1：	1
7	Fabrication technologies for microsystems utilizing photoetchable glass显示文摘	DIETRICH T R EHRFELD W LACHER M	1996	Microelectronic Engineering1996，30，4：	1
8	Combinat ion of Excimer Laser Micro marching and Replication Processes Suited for Large Scale Product ion 显示文摘	A rnold J Ehrfeld Dasbach W Hesch K	1995	App lied Surface Science1995，86，：	1
9	Electrochemistry and microsystems显示文摘	EHRFELD W	2003	Electrochimica Acta2003，48，202122：	1
10	Electrochemistry and microsystems显示文摘	Ehrfeld W	2003	Electrochim Acta2003，48，20222：	1
11	Progress in deep-etch synchrotron radiation lithography显示文摘	W Ehrfeld P Bley F Gotz	1988	J Vac Sci Technol1988，6，1：	1
12	Fabrication of microstructures with high aspect retios and great structural heights by synchrotron radiation lithography galvanofoming and plastic moulding(LIGA process)显示文摘	Becker E W Ehrfeld W Hagmann P	1986	Microelectronic Engineering1986，，4：	1
13	Fabrication Technologies for Microsystems Utilizing Photoetchable Glass显示文摘	Dietrich T R Ehrfeld W Lacher M	1996	Microelectronic Engineering1996，30，：	1
14	Electrochemistry and Microsystems显示文摘	Ehrfeld W	2003	Electro- chimica Acta2003，48，2022：	1
15	Material of LIGA technology 显示文摘	EHRFELD W HESSEL V LOWE H	1999	Microsystems Technologies1999，5，3：	1
16	Design and relization of a penny- shaped micromotor显示文摘	M Nienhaus W Ehrfeld F Michel	1999	SPIE1999，3680，：	1
17	Fabrication of microstructures with high aspect rations and great structural heights by synchrotron radiation lithography,galvanoforming,and plastic molding (LIGA process)显示文摘	BECKER E W EHRFELD W HAGMANN P	1986	Microelectronic Engineering1986，，4：	1
18	Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming and plastic moulding(LIGA process)显示文摘	Becker E W Ehrfeld W Hagman P	1986	Microelectron Eng1986，，4：	1
19	Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics, radiat显示文摘	Ehrfeld W Lehr H	1995	Phys Chem1995，45，3：	1
20	Tools and Methods for Automated Assembly of Miniaturized Gear Systems显示文摘	Niwnaus M Ehrfeld W Berg U	2000	Proceeding of SPIE2000，33，：	1

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