| 1 | Effect of Nitrogen Content on Microstructures and Mechanical Properties of WB_2(N) Films Deposited by Reactive Magnetron Sputtering显示文摘In the present study,WB_2(N) films are fabricated on silicon and YG8 substrates at different N_2 pressures by reactive magnetron sputtering.The influence of N_2 partial pressure(P_(N2)) on the film microstructure and characteristics is studied systematically,including the chemical composition,crystalline structure,residual stress,surface roughness as well as the surface and the cross-section morphology.Meanwhile,nano-indentation and ball-on-disk tribometer are performed to analyze the mechanical and tribological properties of the films.The results show that the addition of nitrogen apparently leads to the change of the structure from(1 0 1) to(0 0 1) orientation then to the amorphous structure with the formation of BN phase.And the addition of nitrogen can greatly refine the grain size and microstructure of the films.Furthermore,the residual stress of the film is also found to change from tensile to compressive stress as a function of P_(N2),and the compressive stress increases with P_(N2),The WB_2(N) films with small nitrogen content,which are deposited at P_(N2) of 0.004 and 0.006 Pa,exhibit better mechanical,tribological and corrosion properties than those of other films.Further increase of nitrogen content accelerates the formation of BN phase and fast decreases the film hardness.In addition,the large N_2 partial pressure gives rise to the target poisoning accompanied by the increase of the target voltage and the decrease of the deposition rate. | Y.M.Liu D.Y.Deng H.Lei Z.L.Pei C.L.Jiang C.Sun J.Gong | 2015 | Journal of Materials Science & Technology2015，31，12： | 5 |
| 3 | Microstructure and Properties of WB_(2)/Cr Multilayer Films with Different Bilayer Numbers Deposited by Magnetron Sputtering显示文摘The influence of the bilayer number on the microstructure,mechanical properties,adhesion strength and tribological behaviors of the WB_(2)/Cr multilayer films was systematically investigated in the present study.Five groups of WB_(2)/Cr films with the same modulation ratio were synthesized by magnetron sputtering technique.The crystalline structure of the films was determined by X-ray diffraction.The morphologies and the microstructure of the films were observed by scanning electron microscopy,atomic force microscopy and transmission electron microscopy.Furthermore,Nano indenter,scratch tester and ball-on-disc tribometer were used to evaluate the mechanical and tribological properties.As bilayer numbers varied from 5 to 40,the hardness increased first and then decreased with the maximum hardness of 33.9 GPa when the bilayer number is 30.The H/E^(*)and H^(3)/E^(*2)values calculated to evaluate the fracture toughness showed the similar changing trend with hardness.The adhesion strength reached the maximum of 67 N when the bilayer number is 30.The surface roughness and friction coefficient decreased with increasing bilayer number.The wear mechanism was also investigated,and the results suggested that the multilayer film with bilayer number of 30 exhibited the best wear resistance(1.78×10^(–7)mm^(3)/Nm),benefiting from the contribution of high hardness,fracture toughness and adhesion strength. | W.B.Shi Y.M.Liu W.H.Li T.Li H.Lei J.Gong C.Sun | 2022 | Acta Metallurgica Sinica(English Letters)2022，35，4： | 0 |
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