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| 1 | Scale dependence of tensile strength of micromachined polysilicon MEMS structures due to microstructural and dimensional constraints显示文摘The success of microelectromechanical systems (MEMS) as a key technology in the 21st century depends in no small part on the solution of materials issues associated with the design and fabrication of complex MEMS devices. The reliable mechanical properties of these thin films are critical to the safety and functioning of these microdevices and should be accurately determined. In order to accomplish a reliable mechanical design of MEMS, a new microtensile test device using a magnetic-solenoid force actuator was developed to evaluate the mechanical properties of microfabricated polysilicon thin films with dimensions of 100—660 mm length, 20—200 mm width, and 2.4 mm thickness. It was found that the measured average value of Young抯 modulus, 164±1.2 GPa, falls within the theoretical bounds. The average fracture strength is 1.36 GPa with a standarddeviation of 0.14 GPa, and the Weibull modulus is 10.4—11.7, respectively. Statistical analysis of the specimen size effect on the tensile strength predicated the size effect on the length, the surface area and the volume of the specimens due tomicrostructural and dimensional constraints. The fracturestrength increases with the increase of the ratio of surfacearea to volume. In such cases the size effect can be tracedback to the ratio of surface area to volume as the governing parameter. The test data account for the uncertainties inmechanical properties and may be used in the future reliability design of polysilicon MEMS. The testing of 40specimens to failure results in a recommendation for design that the nominal strain be maintained below 0.0057. | Ding, JN Meng, YG Wen, SH | 2001 | Chinese Science Bulletin2001，46，16： | 2 |
| 2 | Matrix metalloproteinase9 and tissue inhibitor of metalloproteinase-3 mRNA expression in ectopic and eutopic endometrium in women with endometriosis:a rationale for endometriotic invasiveness显示文摘 | Chung HW Wen Y Chun SH | 2001 | Fertil Steril2001，75，1： | 1 |
| 3 | FoxM1 expression is significantly associated with cisplatin-based chemotherapy resistance and poor prognosis in advanced non-small cell lung cancer patients显示文摘 | Wang Y Wen L Zhao SH | 2013 | Lung Cancer2013，79，2： | 1 |
| 4 | The association of heart rate variability with parkinsonian motor symptom duration显示文摘 | Harnod D Wen SH Chen SY | 2014 | Yonsei Med J2014，55，： | 1 |
| 5 | Matrix metalloproteinase --9 and tissue inhibitor of metalloproteinase - 3 mRNA expression in ectopic and eutopie endometrium in women with endometriosis:a rationale for endommetriotie invasiveness显示文摘 | Chung HW Wen Y Chun SH | 2001 | Fertil Steril2001，75，1： | 1 |
| 6 | Antigen-antibody comples as lherapeu- tie vaccine for viral hepatitis 显示文摘 | Wen YM Qu D Zhou SH | 1999 | B hat Rev lmmunol1999，18，3： | 1 |
| 7 | Hairy roots are more sensitive to auxin than normal mots显示文摘 | WEN H SH PETIT A JEAN G | 1988 | PNAS1988，85，10： | 1 |
| 8 | Simple interpolated FFT algorithm based on minimize sidelobe windows for power-harmonic analysis 显示文摘 | WEN H TENG ZH SH WANG Y | 2011 | IEEE Transactions on Power Electronics2011，26，9： | 1 |
| 9 | Fabrication and optimization of the multiplex PCR-based oligonucleotide microarray for detection of Neisseria gonorrhoeae,Chlamydia trachomatis and Ureaplasma urealyticum显示文摘 | Shi G Wen SY Chen SH | 2005 | J Microbiol Methods2005，62，2： | 1 |
| 10 | Dexmedetomidine administration before,but not after,ischemia attenuates intestinal injury induced by intestinal ischemia-reperfusion in rats显示文摘 | Zhang XY Liu ZM Wen SH | 2012 | Anesthesiology2012，116，5： | 1 |
| 11 | Increased β -secretase activity and expression in rats following transientcerebral ischemia显示文摘 | Wen Y Onyewuchi O Yang SH | 2004 | Brain Research2004，1009，： | 1 |
| 12 | Ischemic postcondi- tioning during reperfusion attenuates oxidative stress and intestinal mucosal apoptosis induced by intestinal ischemia/reperfusion via aldose reductase 显示文摘 | Wen SH Ling YH Li Y | 2013 | Surger- y2013，153，4： | 1 |
| 13 | Simple interpolated FFT algorithm based on minimize sidelobe windows for power - harmonic analysis 显示文摘 | WEN H TENG ZH SH WANG Y | 2011 | IEEE Trans on Power Electronics2011，26，9： | 1 |
| 14 | Dense Radio Frequency Interference Suppression in HF Radars显示文摘 | Zhou H Wen B Y Wu SH C | 2005 | IEEE Signal Processing Letters2005，12，5： | 1 |
| 15 | A survey on core competen- cies of master of public health students in China显示文摘 | Wen SH Ma XQ Liu LJ et a/ | 2013 | Public Heahh2013，127，10： | 1 |
| 16 | Matrix metalloproteinase-9 and tissue inhibitor of metalloproteinase-3 mRNA expression in ectopic and eutopic endometrium in women with endometriosis:A rationale for endometriotic invasiveness显示文摘 | Wen Y Chun SH | 2001 | Fertil Steril2001，75，1： | 1 |
| 17 | Improvement of the high-rate discharge properties of LiCo02 with the Ag additives 显示文摘 | Huang SH Wen ZY Yang XL Gu ZH Xu XH | 2005 | J Power Sources2005，148，： | 1 |
| 18 | Distributions of human leuko- cyte antigen-A, -B, and -DRB1 alleles and haplotypes based on 46,915 Taiwanese donors 显示文摘 | Lai MJ Wen SH Lin YH etal | 2010 | Hum Immunol2010，71，： | 1 |
| 19 | Matrix metalloproteinase-9 and tissue inhibitor of matrix metalloproteinase-9and tissue inhibitor of metalloproteinase-3 mRNA expression in ectopic and eutopic endometrium in women with endometriosis:a rationale for endometriotic invasiveness显示文摘 | Chung HW Wen Y Chun SH | 2001 | Fertil Steril2001，75，： | 1 |
| 20 | Dexmedetomidine administration before,but not after,ischemia attenuates intestinal injury induced by intestinal ischemia-reperfusion in rats显示文摘 | Zhang XY Liu ZM Wen SH | | 0，，05： | 1 |
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