维普期刊资源整合服务平台（V6.5）

维普中文期刊产品整合服务

1篇 您的检索式：作者名="Zhaochong Ding"

选中清除导出查看参考文献查看引证文献引用追踪共1页首页上一页第1页下一页末页 /1 跳转

		题名	作者	年代	出处	被引量
	1	AlScN films prepared by alloy targets and SAW device characteristics显示文摘In this paper,we reported a surface acoustic wave(SAW)device prepared and optimized by piezoelectric films containing AIN,AIScN(Sc-20 at%)and AIScN(Sc-30 at%)by reactive magnetron sputtering using Al and AISc alloy targets.We calculated the material intrinsic electromechanical coupling coefficient k_(t)^(2) of AlScN(Sc-20 at%)and AlScN(Sc-30 at%)which are much better than AIN.It can be explained by the lattice softening.Furtherly,the results were confirmed by transmission electron microscopy(TEM)observation of the microstructure.Then the SAW devices based on three thin films were tested by vector network analysis obtaining the device equivalent electro mechanical coupling coefficient k_(eff)^(2).The value of AIScN(Sc-20 at%)k_(eff)^(2),which equals to 1.94%,is higher than that of AIN and AIScN(Sc-30 at%)while the value of AIScN(Sc-30 at%)k_(t)^(2) is higher than that of others.It is shown in our study that the crystallinity and orientation of the material still have a greater impact on k_(eff)^(2) but it does not have influence on k_(t)^(2) in the actual device preparation process.	Kuo Men Hao Liu Xingquan Wang Qian Jia Zhaochong Ding Huating Wu Daogao Wu Yuhua Xiong	2023	Journal of Rare Earths2023，41，3：	0

返回顶部每页显示：

共1页首页上一页第1页下一页末页 /1 跳转

goolge学术搜索-维普

网站首页 | 关于我们 | 联系我们 | 产品服务 | 客服中心 | 广告服务 | 版权声明 | 网站联盟 | 友情链接 | 售卡网点

版权所有© 渝B2-20050021-1　渝公网安备 50019002500403号　违法和不良信息举报中心

互联网出版许可证新出网证(渝)字10号全国400电话 - 免长途话费