High-performance silicon−graphene hybrid plasmonic waveguide photodetectors beyond 1.55μm

查看全文 作　　者：Jingshu [1,2]Guo;Jiang [1]Li;Chaoyue [1]Liu;Yanlong [1]Yin;Wenhui [3]Wang;Zhenhua [3]Ni;Zhilei [4]Fu;Hui [4]Yu;Yang [2,4]Xu;Yaocheng [1,2]Shi;Yungui [1]Ma;Shiming [1,2]Gao;Limin [1]Tong;Daoxin [1,2]Dai

机构地区：[1]State Key Laboratory for Modern Optical Instrumentation,Zhejiang Provincial Key Laboratory for Sensing Technologies,College of Optical Science and Engineering,International Research Center for Advanced Photonics,Zhejiang University,Zijingang Campus,310058 Hangzhou,China;[2]Ningbo Research Institute,Zhejiang University,315100 Ningbo,China;[3]Department of Physics and Key Laboratory of MEMS of the Ministry of Education,Southeast University,211189 Nanjing,China;[4]College of Information Science and Electronic Engineering,Zhejiang University,310027 Hangzhou,Zhejiang,China

出　　处：《Light(Science & Applications)》索引2020年第9卷第1期,共11页

基　　金：supported by the National Major Research and Development Program(No.2018YFB2200200);National Science Fund for Distinguished Young Scholars(61725503);National Natural Science Foundation of China(NSFC)(61905210 and 91950205);China Postdoctoral Science Foundation(2019M662041);Zhejiang Provincial Natural Science Foundation(LZ18F050001 and LD19F050001). 摘　　要：Graphene has attracted much attention for the realization of high-speed photodetection for silicon photonics over a wide wavelength range.However,the reported fast graphene photodetectors mainly operate in the 1.55μm wavelength band.In this work,we propose and realize high-performance waveguide photodetectors based on bolometric/photoconductive effects by introducing an ultrathin wide silicon−graphene hybrid plasmonic waveguide,which enables efficient light absorption in graphene at 1.55μm and beyond.When operating at 2μm,the present photodetector has a responsivity of ~70 mA/W and a setup-limited 3 dB bandwidth of >20 GHz.When operating at 1.55μm,the present photodetector also works very well with a broad 3 dB bandwidth of >40 GHz(setup-limited)and a high responsivity of ~0.4 A/W even with a low bias voltage of−0.3 V.This work paves the way for achieving highresponsivity and high-speed silicon-graphene waveguide photodetection in the near/mid-infrared ranges,which has applications in optical communications,nonlinear photonics,and on-chip sensing. 关键词：WAVEGUIDE BEYOND performance

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High-performance silicon−graphene hybrid plasmonic waveguide photodetectors beyond 1.55μm

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