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Recent advances in nanorobotic manipulation inside scanning electron microscopes

查看全文 作　　者：Chaoyang [1]Shi;Devin K [1]Luu;Qinmin [2]Yang;Jun [1]Liu;Jun [1]Chen;Changhai [3]Ru;Shaorong [4]Xie;Jun [4]Luo;Ji [1]Ge;Yu [1]Sun 高影响力作者 机构地区：[1]Department of Mechanical and Industrial Engineering,University of Toronto,Toronto,ON,Canada M5S 3G8;[2]Department of Control Science and Engineering,Zhejiang University,Hangzhou 310058,China;[3]Robotics and Microsystems Center,Soochow University,Suzhou 215021,China;[4]School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200072,China高影响力机构 出　　处：《Microsystems & Nanoengineering》索引2016年第2卷第1期,共16页高影响力期刊 基　　金：This study was supported by the Natural Sciences and Engineering Research Council of Canada,the Canada Research Chairs Program,and the Ontario Ministry of Research and Innovation via an ORF-RE grant. 摘　　要：A scanning electron microscope(SEM)provides real-time imaging with nanometer resolution and a large scanning area,which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples.Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices.This paper presents a comprehensive survey of recent advances in nanorobotic manipulation,including the development of nanomanipulation platforms,tools,changeable toolboxes,sensing units,control strategies,electron beam-induced deposition approaches,automation techniques,and nanomanipulation-enabled applications and discoveries.The limitations of the existing technologies and prospects for new technologies are also discussed. 关 键 词：automated nanomanipulation scanning electron microscope SEM-based nanomanipulation
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