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| 1 | Emerging flexible and wearable physical sensing platforms for healthcare and biomedical applications显示文摘There are now numerous emerging flexible and wearable sensing technologies that can perform a myriad of physical and physiological measurements.Rapid advances in developing and implementing such sensors in the last several years have demonstrated the growing significance and potential utility of this unique class of sensing platforms.Applications include wearable consumer electronics,soft robotics,medical prosthetics,electronic skin,and health monitoring.In this review,we provide a state-ofthe-art overview of the emerging flexible and wearable sensing platforms for healthcare and biomedical applications.We first introduce the selection of flexible and stretchable materials and the fabrication of sensors based on these materials.We then compare the different solid-state and liquid-state physical sensing platforms and examine the mechanical deformation-based working mechanisms of these sensors.We also highlight some of the exciting applications of flexible and wearable physical sensors in emerging healthcare and biomedical applications,in particular for artificial electronic skins,physiological health monitoring and assessment,and therapeutic and drug delivery.Finally,we conclude this review by offering some insight into the challenges and opportunities facing this field. | Kenry Joo Chuan Yeo Chwee Teck Lim | 2016 | Microsystems & Nanoengineering2016，2，1： | 17 |
| 2 | 0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant(74.9 s)显示文摘The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the performance.For the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance.We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our knowledge.To improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade performance.The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further improved.We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications. | Qingsong Li Dingbang Xiao Xin Zhou Yi Xu Ming Zhuo Zhanqiang Hou Kaixuan He Yongmeng Zhang Xuezhong Wu | 2018 | Microsystems & Nanoengineering2018，4，1： | 16 |
| 3 | Isolation of circulating tumor cells in non-small-cell-lung-cancer patients using a multi-flow microfluidic channel显示文摘Circulating tumor cells(CTCs)carry a wealth of information on primary and metastatic tumors critical for precise cancer detection,monitoring,and treatment.Numerous microfluidic platforms have been developed in the past few years to capture these rare cells in patient bloodstream for deciphering the critical information needed.However,the practical need for a high-quality method of CTC isolation remains to be met.Herein,we demonstrate a novel multi-flow microfluidic device that is able to sensitively provide high purity(>87%)of separation outcome without labeling.Our device is constructed and configured based on the phenomenal effect of size-dependent inertial migration.The recovery rate of>93%has been achieved using spiked cancer cells at clinically relevant concentrations(10 cells per 5 mL and above).We have also successfully detected CTCs from 6 out of 8 non-small-cell-lung-cancer(NSCLC)patients,while none for 5 healthy control subjects.With these results,we envision our approach is a promising alternative for reliable CTC capture,and thus for facilitating the progress of extracting information from CTCs to personalize treatment strategies for solid tumor patients. | Jian Zhou Arutha Kulasinghe Amanda Bogseth Ken O’Byrne Chamindie Punyadeera Ian Papautsky | 2019 | Microsystems & Nanoengineering2019，5，1： | 9 |
| 4 | High-fidelity replication of thermoplastic microneedles with open microfluidic channels显示文摘Development of microneedles for unskilled and painless collection of blood or drug delivery addresses the quality of healthcare through early intervention at point-of-care.Microneedles with submicron to millimeter features have been fabricated from materials such as metals,silicon,and polymers by subtractive machining or etching.However,to date,large-scale manufacture of hollow microneedles has been limited by the cost and complexity of microfabrication techniques.This paper reports a novel manufacturing method that may overcome the complexity of hollow microneedle fabrication.Prototype microneedles with open microfluidic channels are fabricated by laser stereolithography.Thermoplastic replicas are manufactured from these templates by soft-embossing with high fidelity at submicron resolution.The manufacturing advantages are(a)direct printing from computeraided design(CAD)drawing without the constraints imposed by subtractive machining or etching processes,(b)high-fidelity replication of prototype geometries with multiple reuses of elastomeric molds,(c)shorter manufacturing time compared to three-dimensional stereolithography,and(d)integration of microneedles with open-channel microfluidics.Future work will address development of open-channel microfluidics for drug delivery,fluid sampling and analysis. | Zahra Faraji Rad Robert E.Nordon Carl J.Anthony Lynne Bilston Philip D.Prewett Ji-Youn Arns Christoph H.Arns Liangchi Zhang Graham J.Davies | 2017 | Microsystems & Nanoengineering2017，3，1： | 9 |
| 5 | Finding the optical properties of plasmonic structures by image processing using a combination of convolutional neural networks and recurrent neural networks显示文摘Image processing can be used to extract meaningful optical results from images.Here,from images of plasmonic structures,we combined convolutional neural networks with recurrent neural networks to extract the absorption spectra of structures.To provide the data required for the model,we performed 100,000 simulations with similar setups and random structures.In designing this deep network,we created a model that can predict the absorption response of any structure with a similar setup.We used convolutional neural networks to collect spatial information from the images,and then,we used that data and recurrent neural networks to teach the model to predict the relationship between the spatial information and the absorption spectrum.Our results show that this image processing method is accurate and can be used to replace time-and computationally-intensive numerical simulations.The trained model can predict the optical results in less than a second without the need for a strong computing system.This technique can be easily extended to cover different structures and extract any other optical properties. | Iman Sajedian Jeonghyun Kim Junsuk Rho | 2019 | Microsystems & Nanoengineering2019，5，1： | 9 |
| 6 | A flexible three-dimensional electrode mesh:An enabling technology for wireless brain-computer interface prostheses显示文摘The neural interface is a key component in wireless brain–computer prostheses.In this study,we demonstrate that a unique three-dimensional(3D)microneedle electrode on a flexible mesh substrate,which can be fabricated without complicated micromachining techniques,is conformal to the tissues with minimal invasiveness.Furthermore,we demonstrate that it can be applied to different functional layers in the nervous system without length limitation.The microneedle electrode is fabricated using drawing lithography technology from biocompatible materials.In this approach,the profile of a 3D microneedle electrode array is determined by the design of a two-dimensional(2D)pattern on the mask,which can be used to access different functional layers in different locations of the brain.Due to the sufficient stiffness of the electrode and the excellent flexibility of the mesh substrate,the electrode can penetrate into the tissue with its bottom layer fully conformal to the curved brain surface.Then,the exposed contact at the end of the microneedle electrode can successfully acquire neural signals from the brain. | Zhuolin Xiang Jingquan Liu Chengkuo Lee | 2016 | Microsystems & Nanoengineering2016，2，1： | 8 |
| 7 | Dual color optogenetic control of neural populations using low-noise,multishank optoelectrodes显示文摘Optogenetics allows for optical manipulation of neuronal activity and has been increasingly combined with intracellular and extracellular electrophysiological recordings.Genetically-identified classes of neurons are optically manipulated,though the versatility of optogenetics would be increased if independent control of distinct neural populations could be achieved on a sufficient spatial and temporal resolution.We report a scalable multisite optoelectrode design that allows simultaneous optogenetic control of two spatially intermingled neuronal populations in vivo.We describe the design,fabrication,and assembly of low-noise,multisite/multicolor optoelectrodes.Each shank of the four-shank assembly is monolithically integrated with 8 recording sites and a dualcolor waveguide mixer with a 7×30μm cross-section,coupled to 405 nm and 635 nm injection laser diodes(ILDs)via gradient-index(GRIN)lenses to meet optical and thermal design requirements.To better understand noise on the recording channels generated during diode-based activation,we developed a lumped-circuit modeling approach for EMI coupling mechanisms and used it to limit artifacts to amplitudes under 100μV upto an optical output power of 450μW.We implanted the packaged devices into the CA1 pyramidal layer of awake mice,expressing Channelrhodopsin-2 in pyramidal cells and ChrimsonR in paravalbumin-expressing interneurons,and achieved optical excitation of each cell type using sub-mW illumination.We highlight the potential use of this technology for functional dissection of neural circuits. | Komal Kampasi Daniel F.English John Seymour Eran Stark Sam McKenzie Mihály Vöröslakos György Buzsáki Kensall D.Wise Euisik Yoon | 2018 | Microsystems & Nanoengineering2018，4，1： | 8 |
| 8 | Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits显示文摘This article discusses the transition of a form of nanoimprint lithography technology,known as Jet and Flash Imprint Lithography(J-FIL),from research to a commercial fabrication infrastructure for leading-edge semiconductor integrated circuits(ICs).Leadingedge semiconductor lithography has some of the most aggressive technology requirements,and has been a key driver in the 50-year history of semiconductor scaling.Introducing a new,disruptive capability into this arena is therefore a case study in a“highrisk-high-reward”opportunity.This article first discusses relevant literature in nanopatterning including advanced lithography options that have been explored by the IC fabrication industry,novel research ideas being explored,and literature in nanoimprint lithography.The article then focuses on the J-FIL process,and the interdisciplinary nature of risk,involving nanoscale precision systems,mechanics,materials,material delivery systems,contamination control,and process engineering.Next,the article discusses the strategic decisions that were made in the early phases of the project including:(i)choosing a step and repeat process approach;(ii)identifying the first target IC market for J-FIL;(iii)defining the product scope and the appropriate collaborations to share the risk-reward landscape;and(iv)properly leveraging existing infrastructure,including minimizing disruption to the widely accepted practices in photolithography.Finally,the paper discusses the commercial J-FIL stepper system and associated infrastructure,and the resulting advances in the key lithographic process metrics such as critical dimension control,overlay,throughput,process defects,and electrical yield over the past 5 years.This article concludes with the current state of the art in J-FIL technology for IC fabrication,including description of the high volume manufacturing stepper tools created for advanced memory manufacturing. | S.V.Sreenivasan | 2017 | Microsystems & Nanoengineering2017，3，1： | 8 |
| 9 | A new microchannel capillary flow assay (MCFA) platform with lyophilized chemiluminescence reagents for a smartphone-based POCT detecting malaria显示文摘There has been a considerable development in microfluidic based immunodiagnostics over the past few years which has greatly favored the growth of novel point-of-care-testing(POCT).However,the realization of an inexpensive,low-power POCT needs cheap and disposable microfluidic devices that can perform autonomously with minimum user intervention.This work,for the first time,reports the development of a new microchannel capillary flow assay(MCFA)platform that can perform chemiluminescence based ELISA with lyophilized chemiluminescent reagents.This new MCFA platform exploits the ultra-high sensitivity of chemiluminescent detection while eliminating the shortcomings associated with liquid reagent handling,control of assay sequence and user intervention.The functionally designed microchannels along with adequate hydrophilicity produce a sequential flow of assay reagents and autonomously performs the ultra-high sensitive chemiluminescence based ELISA for the detection of malaria biomarker such as PfHRP2.The MCFA platform with no external flow control and simple chemiluminescence detection can easily communicate with smartphone via USB-OTG port using a custom-designed optical detector.The use of the smartphone for display,data transfer,storage and analysis,as well as the source of power allows the development of a smartphone based POCT analyzer for disease diagnostics.This paper reports a limit of detection(LOD)of 8 ng/mL by the smartphone analyzer which is sensitive enough to detect active malarial infection.The MCFA platform developed with the smartphone analyzer can be easily customized for different biomarkers,so a hand-held POCT for various infectious diseases can be envisaged with full networking capability at low cost. | Sthitodhi Ghosh Kashish Aggarwal Vinitha T.U Thinh Nguyen Jungyoup Han Chong H.Ahn | 2020 | Microsystems & Nanoengineering2020，6，1： | 7 |
| 10 | Hierarchical highly ordered SnO_(2) nanobowl branched ZnO nanowires for ultrasensitive and selective hydrogen sulfide gas sensing显示文摘Highly sensitive and selective hydrogen sulfide(H_(2)S)sensors based on hierarchical highly ordered SnO_(2) nanobowl branched ZnO nanowires(NWs)were synthesized via a sequential process combining hard template processing,atomic-layer deposition,and hydrothermal processing.The hierarchical sensing materials were prepared in situ on microelectromechanical systems,which are expected to achieve high-performance gas sensors with superior sensitivity,long-term stability and repeatability,as well as low power consumption.Specifically,the hierarchical nanobowl SnO_(2)@ZnO NW sensor displayed a high sensitivity of 6.24,a fast response and recovery speed(i.e.,14 s and 39 s,respectively),and an excellent selectivity when detecting 1 ppm H_(2)S at 250°C,whose rate of resistance change(i.e.,5.24)is 2.6 times higher than that of the pristine SnO_(2) nanobowl sensor.The improved sensing performance could be attributed to the increased specific surface area,the formation of heterojunctions and homojunctions,as well as the additional reaction between ZnO and H_(2)S,which were confirmed by electrochemical characterization and band alignment analysis.Moreover,the well-structured hierarchical sensors maintained stable performance after a month,suggesting excellent stability and repeatability.In summary,such well-designed hierarchical highly ordered nanobowl SnO_(2)@ZnO NW gas sensors demonstrate favorable potential for enhanced sensitive and selective H_(2)S detection with long-term stability and repeatability. | Li-Yuan Zhu Kai-Ping Yuan Jia-He Yang Cheng-Zhou Hang Hong-Ping Ma Xin-Ming Ji Anjana Devi Hong-Liang Lu David Wei Zhang | 2020 | Microsystems & Nanoengineering2020，6，1： | 7 |
| 11 | A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants显示文摘This paper reports a complete micro gas chromatography(μGC)system in which all the components are lithographically microfabricated and electronically interfaced.The components include a bi-directional Knudsen pump,a preconcentrator,separation columns and a pair of capacitive gas detectors;together,these form the iGC3.c2 system.All the fluidic components of the system are fabricated by a common three-mask lithographic process.The Knudsen pump is a thermomolecular pump that provides air flow to theμGC without any moving parts.The film heaters embedded in the separation columns permit temperature programming.The capacitive detectors provide complementary response patterns,enhancing vapor recognition and resolving coeluting peaks.With the components assembled on printed circuit boards,the system has a footprint of 8×10 cm^(2).Using room air as the carrier gas,the system is used to experimentally demonstrate the analysis of 19 chemicals with concentration levels on the order of parts per million(p.p.m.)and parts per billion(p.p.b.).The tested chemicals include alkanes,aromatic hydrocarbons,aldehydes,halogenated hydrocarbons and terpenes.This set of chemicals represents a variety of common indoor air pollutants,among which benzene,toluene and xylenes(BTX)are of particular interest. | Yutao Qin Yogesh B Gianchandani | 2016 | Microsystems & Nanoengineering2016，2，1： | 6 |
| 12 | Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm显示文摘This paper describes a novel,semiautomated design methodology based on a genetic algorithm(GA)using freeform geometries for microelectromechanical systems(MEMS)devices.The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity,large bandwidth,and large fabrication tolerances.The proposed method does not require much computation time or memory.The use of freeform geometries allows more degrees of freedom in the design process,improving the diversity and performance of MEMS devices.A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach.Experimental results show an improvement in the product of sensitivity and bandwidth by 100%and a sensitivity improvement by 141%compared to the case of a device designed with conventional orthogonal shapes.Furthermore,excellent immunities to fabrication tolerance and parameter mismatch are achieved. | Chen Wang Xiaoxiao Song Weidong Fang Fang Chen Ioannis Zeimpekis Yuan Wang Aojie Quan Jian Bai Huafeng Liu Gerold Schropfer Chris Welham Michael Kraft | 2020 | Microsystems & Nanoengineering2020，6，1： | 6 |
| 13 | An epidermal sEMG tattoo-like patch as a new human–machine interface for patients with loss of voice显示文摘Throat cancer treatment involves surgical removal of the tumor,leaving patients with facial disfigurement as well as temporary or permanent loss of voice.Surface electromyography(sEMG)generated from the jaw contains lots of voice information.However,it is difficult to record because of not only the weakness of the signals but also the steep skin curvature.This paper demonstrates the design of an imperceptible,flexible epidermal sEMG tattoo-like patch with the thickness of less than 10μm and peeling strength of larger than 1N cm−1 that exhibits large adhesiveness to complex biological surfaces and is thus capable of sEMG recording for silent speech recognition.When a tester speaks silently,the patch shows excellent performance in recording the sEMG signals from three muscle channels and recognizing those frequently used instructions with high accuracy by using the wavelet decomposition and pattern recognization.The average accuracy of action instructions can reach up to 89.04%,and the average accuracy of emotion instructions is as high as 92.33%.To demonstrate the functionality of tattoo-like patches as a new human–machine interface(HMI)for patients with loss of voice,the intelligent silent speech recognition,voice synthesis,and virtual interaction have been implemented,which are of great importance in helping these patients communicate with people and make life more enjoyable. | Huicong Liu Wei Dong Yunfei Li Fanqi Li Jiangjun Geng Minglu Zhu Tao Chen Hongmiao Zhang Lining Sun Chengkuo Lee | 2020 | Microsystems & Nanoengineering2020，6，1： | 6 |
| 14 | A toolkit of thread-based microfluidics,sensors,and electronics for 3D tissue embedding for medical diagnostics显示文摘Threads,traditionally used in the apparel industry,have recently emerged as a promising material for the creation of tissue constructs and biomedical implants for organ replacement and repair.The wicking property and flexibility of threads also make them promising candidates for the creation of three-dimensional(3D)microfluidic circuits.In this paper,we report on thread-based microfluidic networks that interface intimately with biological tissues in three dimensions.We have also developed a suite of physical and chemical sensors integrated with microfluidic networks to monitor physiochemical tissue properties,all made from thread,for direct integration with tissues toward the realization of a thread-based diagnostic device(TDD)platform.The physical and chemical sensors are fabricated from nanomaterial-infused conductive threads and are connected to electronic circuitry using thread-based flexible interconnects for readout,signal conditioning,and wireless transmission.To demonstrate the suite of integrated sensors,we utilized TDD platforms to measure strain,as well as gastric and subcutaneous pH in vitro and in vivo. | Pooria Mostafalu Mohsen Akbari Kyle A.Alberti Qiaobing Xu Ali Khademhosseini Sameer R.Sonkusale | 2016 | Microsystems & Nanoengineering2016，2，1： | 6 |
| 15 | Miura-origami-inspired electret/triboelectric power generator for wearable energy harvesting with water-proof capability显示文摘One of the critical issues for electret/triboelectric devices is the poor charge viability and stability in humid environments.Herein,we propose a new origami-inspired“W-tube”-shaped triboelectric nanogenerator(W-TENG)with two thin-film electrets folded based on Miura-origami.The Miura-origami fold is capable of transforming flat materials with large surface areas into reduced and compressed complex 3D structures with parallelogram tessellations.The triboelectric power generation components can thus be hermetically sealed inside the“W-tube”to avoid contact with the external humid environment.Furthermore,the elastic nature of the Miura-origami fold endows the proposed W-TENG device with excellent deformability,flexibility,and stretchability.Therefore,it is capable of harvesting kinetic energy from various directions and forms of movement,including horizontal pressing,vertical tapping,and lateral bending.The compact,light weight,and self-rebounding properties of the origami structure also make it convenient for integration into wearable devices.Various parameters of the W-TENG are intensively investigated,including the number of power generation units,original height of the device,acceleration magnitude,excitation direction,and water-proof capability.Triggered by hand tapping impulse excitation in the horizontal and vertical directions,the instantaneous open-circuit voltages can reach 791 V and 116 V with remarkable optimum powers of 691μW at 50MΩand 220μW at 35 MΩ,respectively.The outcomes of this work demonstrate the fusion of the ancient art of origami,material science,and energy conversion techniques to realize flexible,multifunctional,and water-proof TENG devices. | Kai Tao Haiping Yi Yang Yang Lihua Tang Zhaoshu Yang Jin Wu Honglong Chang Weizheng Yuan | 2020 | Microsystems & Nanoengineering2020，6，1： | 6 |
| 16 | Real-time pressure mapping smart insole system based on a controllable vertical pore dielectric layer显示文摘Real-time monitoring of plantar pressure has significant applications in wearable biosensors,sports injury detection,and early diagnostics.Herein,an all-in-one insole composed of 24 capacitive pressure sensors(CPSs)with vertical pores in an elastic dielectric layer is fabricated by laser cutting.Optimized CPSs with a hexagonal configuration and a pore size of 600μm possess good linearity over a wide detection range of 0–200 kPa with a sensitivity of 12×10^(–3) kPa−1.Then,a smart system including the all-in-one insole with the 24 CPS array,a data acquisition system with a wireless transmitter and a PC terminal with a wireless receiver is established for real-time monitoring to realize static and dynamic plantar pressure mapping.Based on this smart insole system,various standing and yoga postures can be distinguished,and variations in the center of gravity during walking can be recognized.This intelligent insole system provides great feasible supervision for health surveillance,injury prevention,and athlete training. | Juan Tao Ming Dong Li Li Chunfeng Wang Jing Li Yue Liu Rongrong Bao Caofeng Pan | 2020 | Microsystems & Nanoengineering2020，6，1： | 6 |
| 17 | Kirigami-inspired,highly stretchable microsupercapacitor patches fabricated by laser conversion and cutting显示文摘The recent developments in material sciences and rational structural designs have advanced the field of compliant and deformable electronics systems.However,many of these systems are limited in either overall stretchability or areal coverage of functional components.Here,we design a construct inspired by Kirigami for highly deformable microsupercapacitor patches with high areal coverages of electrode and electrolyte materials.These patches can be fabricated in simple and efficient steps by laser-assisted graphitic conversion and cutting.Because the Kirigami cuts significantly increase structural compliance,segments in the patches can buckle,rotate,bend and twist to accommodate large overall deformations with only a small strain(<3%)in active electrode areas.Electrochemical testing results have proved that electrical and electrochemical performances are preserved under large deformation,with less than 2%change in capacitance when the patch is elongated to 382.5%of its initial length.The high design flexibility can enable various types of electrical connections among an array of supercapacitors residing in one patch,by using different Kirigami designs. | Renxiao Xu Anton Zverev Aaron Hung Caiwei Shen Lauren Irie Geoffrey Ding Michael Whitmeyer Liangjie Ren Brandon Griffin Jack Melcher Lily Zheng Xining Zang Mohan Sanghadasa Liwei Lin | 2018 | Microsystems & Nanoengineering2018，4，1： | 6 |
| 18 | Toward point-of-care management of chronic respiratory conditions:Electrochemical sensing of nitrite content in exhaled breath condensate using reduced graphene oxide显示文摘We present a portable non-invasive approach for measuring indicators of inflammation and oxidative stress in the respiratory tract by quantifying a biomarker in exhaled breath condensate(EBC).We discuss the fabrication and characterization of a miniaturized electrochemical sensor for detecting nitrite content in EBC using reduced graphene oxide.The nitrite content in EBC has been demonstrated to be a promising biomarker of inflammation in the respiratory tract,particularly in asthma.We utilized the unique properties of reduced graphene oxide(rGO);specifically,the material is resilient to corrosion while exhibiting rapid electron transfer with electrolytes,thus allowing for highly sensitive electrochemical detection with minimal fouling.Our rGO sensor was housed in an electrochemical cell fabricated from polydimethyl siloxane(PDMS),which was necessary to analyze small EBC sample volumes.The sensor is capable of detecting nitrite at a low over-potential of 0.7 V with respect to an Ag/AgCl reference electrode.We characterized the performance of the sensors using standard nitrite/buffer solutions,nitrite spiked into EBC,and clinical EBC samples.The sensor demonstrated a sensitivity of 0.21μAμM^(−1) cm^(−2) in the range of 20–100μM and of 0.1μAμM^(−1) cm^(−2) in the range of 100–1000μM nitrite concentration and exhibited a low detection limit of 830 nM in the EBC matrix.To benchmark our platform,we tested our sensors using seven pre-characterized clinical EBC samples with concentrations ranging between 0.14 and 6.5μM.This enzyme-free and label-free method of detecting biomarkers in EBC can pave the way for the development of portable breath analyzers for diagnosing and managing changes in respiratory inflammation and disease. | Azam Gholizadeh Damien Voiry Clifford Weisel Andrew Gow Robert Laumbach Howard Kipen Manish Chhowalla Mehdi Javanmard | 2017 | Microsystems & Nanoengineering2017，3，1： | 5 |
| 19 | 3D-printed microelectronics for integrated circuitry and passive wireless sensors显示文摘Three-dimensional(3D)additive manufacturing techniques have been utilized to make 3D electrical components,such as resistors,capacitors,and inductors,as well as circuits and passive wireless sensors.Using the fused deposition modeling technology and a multiple-nozzle system with a printing resolution of 30μm,3D structures with both supporting and sacrificial structures are constructed.After removing the sacrificial materials,suspensions with silver particles are injected subsequently solidified to form metallic elements/interconnects.The prototype results show good characteristics of fabricated 3D microelectronics components,including an inductor–capacitor-resonant tank circuitry with a resonance frequency at 0.53 GHz.A 3D“smart cap”with an embedded inductor–capacitor tank as the wireless passive sensor was demonstrated to monitor the quality of liquid food(e.g.,milk and juice)wirelessly.The result shows a 4.3%resonance frequency shift from milk stored in the room temperature environment for 36 h.This work establishes an innovative approach to construct arbitrary 3D systems with embedded electrical structures as integrated circuitry for various applications,including the demonstrated passive wireless sensors. | Sung-Yueh Wu Chen Yang Wensyang Hsu Liwei Lin | 2015 | Microsystems & Nanoengineering2015，1，1： | 5 |
| 20 | An implantable microelectrode array for simultaneous L-glutamate and electrophysiological recordings in vivo显示文摘L-glutamate,the most common excitatory neurotransmitter in the mammalian central nervous system(CNS),is associated with a wide range of neurological diseases.Because neurons in CNS communicate with each other both electrically and chemically,dualmode(electric and chemical)analytical techniques with high spatiotemporal resolution are required to better understand glutamate function in vivo.In the present study,a silicon-based implantable microelectrode array(MEA)composed of both platinum electrochemical and electrophysiological microelectrodes was fabricated using micro-electromechanical system.In the MEA probe,the electrophysiological electrodes have a low impedance of 0.018 MΩat 1 kHz,and the electrochemical electrodes show a sensitivity of 56 pAμM^(−1) to glutamate and have a detection limit of 0.5μM.The MEA probe was used to monitor extracellular glutamate levels,spikes and local field potentials(LFPs)in the striatum of anaesthetised rats.To explore the potential of the MEA probe,the rats were administered to KCl via intraperitoneal injection.K+significantly increases extracellular glutamate levels,LFP low-beta range(12–18 Hz)power and spike firing rates with a similar temporal profile,indicating that the MEA probe is capable of detecting dual-mode neuronal signals.It was concluded that the MEA probe can help reveal mechanisms of neural physiology and pathology in vivo. | Wenjing Wei Yilin Song Li Wang Song Zhang Jinping Luo Shengwei Xu Xinxia Cai | 2015 | Microsystems & Nanoengineering2015，1，1： | 4 |
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