Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

查看全文 作　　者：Zihao [1]Dong;Qipei [1]He;Dawei [1]Shen;Zheng [1]Gong;Deyuan [1]Zhang;Wenqiang [2]Zhang;Takahito [3]Ono;Yonggang [1]Jiang

机构地区：[1]Institute of Bionic and Micronano Systems,School of Mechanical Engineering and Automation,Beihang University,Beijing 100191,China;[2]College of Engineering,China Agricultural University,Bejing 100083,China;[3]Graduate School of Engineering,Tohoku University,6-6-01 Aramaki-Aza-Aoba,Aoba-ku,Sendai980-8579,Japan

出　　处：《Microsystems & Nanoengineering》索引2023年第9卷第2期,共22页

基　　金：supported by the National Natural Science Foundation of China(T2121003,No.52022008,51975030);partially supported by the Bejing Municipal Natural Science Foundation(M22021). 摘　　要：Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties,including high thermal stability,mechanical strength,and chemical resistance values.In the past decade,rapid progress has been made in the microfabrication of polyimides.However,enabling technologies,such as laser-induced graphene on polyimide,photosensitive polyimide micropatterning,and 3D polyimide microstructure assembly,have not been reviewed from the perspective of polyimide microfabrication.The aims of this review are to systematically discuss polyimide microfabrication techniques,which cover flm formation,material conversion,micropatterning,3D microfabrication,and their applications.With an emphasis on polyimide-based flexible MEMS devices,we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field. 关键词：field POLYIMIDE FABRICATION

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Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

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