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| 1 | Atomic and Close-to-Atomic Scale Manufacturing:A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy显示文摘Manufacturing at the atomic scale is the next generation of the industrial revolution.Atomic and close-to-atomic scalemanufacturing(ACSM)helps to achieve this.Atomic force microscopy(AFM)is a promising method for this purposesince an instrument to machine at this small scale has not yet been developed.As the need for increasing the number ofelectronic components inside an integrated circuit chip is emerging in the present-day scenario,methods should be adoptedto reduce the size of connections inside the chip.This can be achieved using molecules.However,connecting moleculeswith the electrodes and then to the external world is challenging.Foundations must be laid to make this possible for thefuture.Atomic layer removal,down to one atom,can be employed for this purpose.Presently,theoretical works are beingperformed extensively to study the interactions happening at the molecule-electrode junction,and how electronic transportis affected by the functionality and robustness of the system.These theoretical studies can be verified experimentally only if nano electrodes are fabricated.Silicon is widely used in the semiconductor industry to fabricate electronic components.Likewise,carbon-based materials such as highly oriented pyrolytic graphite,gold,and silicon carbide find applications inthe electronic device manufacturing sector.Hence,ACSM of these materials should be developed intensively.This paperpresents a review on the state-of-the-art research performed on material removal at the atomic scale by electrochemical andmechanical methods of the mentioned materials using AFM and provides a roadmap to achieve effective mass productionof these devices. | Paven Thomas Mathew Brian J.Rodriguez Fengzhou Fang | 2020 | Nanomanufacturing and Metrology2020，3，3： | 9 |
| 2 | Algorithm of Micro-Grooving and Imaging Processing for the Generation of High-Resolution Structural Color Images显示文摘The use of submicron structures for structural coloration of surfaces has broad applications for color filters,projection displays,virtual reality,and anti-counterfeiting.Currently,structural color images lack high resolution due to low manufacturing accuracy.In this study,the axial-feed fly cutting(AFC)method is proposed to fabricate submicron grooves for the diffraction of visible light to create structural color images.We establish the relationship between the color information in the pixels of the original image and the parameters of the array units corresponding to the pixels.An algorithm to determine groove spacing and the tool path is established,and array units with the desired groove spacing are machined to reproduce the structural color images.The submicron grooves fabricated by AFC have high quality and good consistency.Due to the excellent diffraction performance of the machined grooves,images with high saturation and resolution can be reproduced.It is verified that images with various colors can be efficiently fabricated using the proposed method and algorithm. | Tianfeng Zhou Yupeng He Tianxing Wang Xiaobin Dong Peng Liu Wenxiang Zhao Yao Hu Jiwang Yan | 2020 | Nanomanufacturing and Metrology2020，3，3： | 4 |
| 3 | Three-Probe Error Separation with Chromatic Confocal Sensors for Roundness Measurement显示文摘In this study,three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement.Here,the harmonic suppression is discussed first to set suitable orientation angles among three sensors.Monte Carlo simulation is utilized to test the error separation and optimize the orientation angles and off-axial distance.The experimental setup is established using chromatic confocal sensors with a precise rotary platform.The experimental results show that the measured roundness with an orientation-angle combination of(0°,90.1°,and 178.6°)is much better than that of another nonoptimal selection(0°,90.4°,and 177.4°).The roundness error is only 0.7%between the proposed measurement system and an expensive ultraprecision roundness meter.Furthermore,it is proven that the eccentricity distance should be decreased as small as possible to improve the measurement accuracy.In sum,this paper proposes a feasible method for roundness measurement with reliable simulations,easily integrated sensors,and an ordinary precision rotary platform. | Jiao Bai Yingzuo Wang Xiaohao Wang Qian Zhou Kai Ni Xinghui Li | 2021 | Nanomanufacturing and Metrology2021，4，4： | 3 |
| 4 | Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology显示文摘Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed. | Yuki Shimizu | 2021 | Nanomanufacturing and Metrology2021，4，1： | 3 |
| 5 | Automatic Measurement of Silicon Lattice Spacings in High-Resolution Transmission Electron Microscopy Images Through 2D Discrete Fourier Transform and Inverse Discrete Fourier Transform显示文摘Line width(i.e.,critical dimension,CD)is a crucial parameter in integrated circuits.To accurately control the CD in manufacturing,a reasonable CD measurement algorithm is required.We develop an automatic and accurate method based on a two-dimensional discrete Fourier transform for measuring the lattice spacings from high-resolution transmission electron microscopy images.Through the two-dimensional inverse discrete Fourier transform of the central spot and a pair of symmetrical diffraction spots,an image containing only a set of lattice spacings is obtained.Then,the pixel span of the lattice spacing is calculated through the centre of gravity method.Finally,we estimate the standard CD value according to the half-intensity method.The silicon crystal lattice constant guarantees the accuracy and traceability of the CD value.Through experiments,we demonstrate the efficiency of the proposed method,which can be conveniently applied to accurately measure CDs in practical applications. | Fang Wang Yushu Shi Shu Zhang Xixi Yu Wei Li | 2022 | Nanomanufacturing and Metrology2022，5，2： | 2 |
| 6 | A Simulated Investigation of Ductile Response of GaAs in Single-Point Diamond Turning and Experimental Validation显示文摘In this paper,molecular dynamic(MD)simulation was adopted to study the ductile response of single-crystal GaAs during single-point diamond turning(SPDT).The variations of cutting temperature,coordination number,and cutting forces were revealed through MD simulations.SPDT experiment was also carried out to qualitatively validate MD simulation model from the aspects of normal cutting force.The simulation results show that the fundamental reason for ductile response of GaAs during SPDT is phase transition from a perfect zinc blende structure(GaAs-I)to a rock-salt structure(GaAs-II)under high pressure.Finally,a strong anisotropic machinability of GaAs was also found through MD simulations. | Pengfei Fan Fei Ding Xichun Luo Yongda Yan Yanquan Geng Yuzhang Wang | 2020 | Nanomanufacturing and Metrology2020，3，4： | 2 |
| 7 | On-Line Measurement Method for Diameter and Roundness Error of Balls显示文摘This paper presents an on-line measurement method for the diameter and roundness error of balls.An easy-installation rotary scanning system,which integrates the principles of the diameter and the roundness measurements,is constructed.The rotary scanning system consists of a rotary stage,a linear stage,and two sensors with a什at probe.Two sensors are initially installed on the linear stage and contact each other.The outputs of two sensors are reset to zero at first.The ball is then mounted on the rotary stage and positioned between two flat probes.The variations of the diameter and the roundness error of the ball at each angular position can be directly recorded by two sensors when the ball is rotated by the rotary stage.Substituting the outputs of two sensors into the proposed mathematical models,the diameter and roundness error can be evaluated.The effects of the alignment error induced by the spindle error of the rotary stage and the titling error and the eccentric error of the ball on the measurement accuracy can be self-separated in the proposed on-line measurement method.A series of experiments are carried out to verify the effectiveness and the capability of the proposed on-line measurement method and the designed rotary scanning system.The designed system is easy to construct both in the laboratory environment and the factory field. | Yindi Cai Bo Xie Siying Ling Kuang-Chao Fan | 2020 | Nanomanufacturing and Metrology2020，3，3： | 2 |
| 8 | Generating Nanodot Structures on Stainless-Steel Surfaces by Cross Scanning of a Picosecond Pulsed Laser显示文摘Ultrashort pulsed laser-induced periodic surface structures(LIPSS)can be generated on difFerent kinds of materials,which are widely utilized for modifying surface properties such as wettability,adhesion,and tribological,as well as optical performances.Previous studies have focused mainly on one-dimensional LIPSS(i.e.,line structure)generation.In this study,a picosecond pulsed laser was used to irradiate stainless-steel surfaces for generating two-dimensional LIPSS,namely nanodot structures,by cross-scanning the laser beam for a different number of times.The obtained nanodot structures were found to be super hydrophilic just after laser irradiation,but turned to be hydrophobic after exposure in air for a few days.By cross・scanning the laser beam for the same number of times,local LIPSS rewriting was realized.This study showed the possibility of improving the homogeneity of the surface properties of steel materials through laser-induced nanodot structuring. | Tomoki Kobayashi Jiwang Yan | 2020 | Nanomanufacturing and Metrology2020，3，2： | 2 |
| 9 | Anisotropy-Related Machining Characteristics in Ultra-Precision Diamond Cutting of Crystalline Copper显示文摘Deformation behavior at grain levels greatly affects the machining characteristics of crystalline materials.In the present work,we investigate the influence of material anisotropy on ultra-precision diamond cutting of single crystalline and polycrystalline copper by experiments and crystal plasticity finite element simulations.Specifically,diamond turning and in situ SEM orthogonal cutting experiments are carried out to provide direct experimental evidence of the material anisotropy-dependent cutting results in terms of machined surface morphology and chip profile.Corresponding numerical simulations with the analysis of built stress further validate experimental results and reveal the mechanisms governing the material anisotropy influence.The above findings provide insight into the fabrication of ultra-smooth surfaces of polycrystalline metals by ultraprecision diamond turning. | Zhanfeng Wan Junjie Zhang Guo Li Zongwei Xu Haijun Zhang Jianguo Zhang Alexander Hartmaier Fengzhou Fang Yongda Yan Tao Sun | 2020 | Nanomanufacturing and Metrology2020，3，2： | 2 |
| 10 | Roughness Measurements with Polychromatic Speckles on Tilted Surfaces显示文摘Surface light scattering enables contactless and fast measurements of surface roughness.A surface inclination alters the direction of the scattering beam and thus the measured surface roughness is calculated from the detected intensity distribution.Hence,an accurate sensor-surface alignment is necessary.In order to achieve tilt-independent roughness measurements,a model-based evaluation approach for polychromatic speckle patterns is presented.By evaluating the shape of the superposed speckles,which occur for polychromatic illumination,with regard to the distance to the scattering centre,surfaces with an Sa roughness value in the range of 0.8-3.2μm are measurable.Experimental investigations demonstrate that the influence of a surface tilt up to±1.25°on the roughness measurement is reduced by 90%.As a result,the robustness of the polychromatic speckle roughness measurement is improved,which allows to speed up the adjustment of the measurement system or the surface sample,respectively. | Johannes Stempin Andreas Tausendfreund Dirk Stobener Andreas Fischer | 2021 | Nanomanufacturing and Metrology2021，4，4： | 2 |
| 11 | Plowing-Extrusion Processes and Performance of Functional Surface Structures of Copper Current Collectors for Lithium-Ion Batteries显示文摘Most copper current collectors for commercial lithium-ion batteries(LIBs)are smooth copper foils,which cannot form a stable and effective combination with electrode slurry.They are likely to deform or fall off after long-term operation,resulting in a sharp decline in battery performance.What is worse is that this condition inevitably causes internal short circuits and thus brings about security risks.In this study,a process route of fabricating the functional surface structures on the surface of a copper collector for LIBs by twice-crisscross micro-plowing(TCMP)is proposed,which provides a new idea and an efficient method to solve the above problems from the perspective of manufacturing.The finite element simulation of TCMP combined with the cutting force test and morphological characterization is conducted to verify the forming mechanism of the surface structures on a copper sheet and its relationship with the processing parameters.The influence of several key processing parameters on the surface characteristics of the copper sheet is comprehensively explored.A series of functions is tested to obtain the optimal parameters for performance improvement of the current collector.Results show that the structured copper sheet with the cutting distance of 250μm,cutting depth of 80μm,and cutting crossing angle of 90°enables the best surface features of the current collector;the contact angle reaches 0°,the slurry retention rate is up to 89.2%,and the friction coefficient reaches 0.074.The battery using the as-prepared structured copper sheet as the current collector produces a specific capacity of 318.6 mAh/g after 50 cycles at a current density of 0.2 C,which is 132.7%higher than the one based on a smooth surface.The capacity reversibility of the sample with the new current collector is much better than that of the traditional samples,yielding a lower impedance. | Chun Wang Wei Yuan Yu Chen Bote Zhao Yong Tang Shiwei Zhang Xinrui Ding Jun He Songmao Chen Baoyou Pan Mingyue Chen | 2022 | Nanomanufacturing and Metrology2022，5，4： | 2 |
| 12 | WWW system solution for hydrocarbon pollution monitoring and environment protection显示文摘 | Michalski A Kalicki A Staroszczyk Z | 2006 | 18th IMEKO World Congress 2006: Metrology for a Sustainable Development2006，3，： | 1 |
| 13 | A Velocity MeasurementMethod Based on Scaling Parameter Estimation of Cha-otic System显示文摘 | Liu L D Hu J F He Z S | 2011 | Metrology and Measurement System2011，18，2： | 1 |
| 14 | Time-interval measuring module with short dead-time 显示文摘 | Zielifiski M Chbaerski D Grzelak S | 2003 | Metrology and Measurements Systems2003，，3： | 1 |
| 15 | Review of single-state time-interval measurement modules implemented in FPGA devices显示文摘 | Zielihski M | 2009 | Metrology and Meas-urement Systems2009，，： | 1 |
| 16 | Mechanical and ther- mal performance of C/SiC composites for SPICA mirror显示文摘 | Ozaki T Kume M Oshima T | 2004 | Optical Fabrication Metrology and Material Advancements for Telescopes Proceedings of the SHE2004，5494，： | 1 |
| 17 | An investigation into the performance of probes on coordinate measuring machines 显示文摘 | Butler C | 1991 | Industrial Metrology 21991，2，1： | 1 |
| 18 | Development of the Ultrasonic Thermometry in Measuring Temperature Field 显示文摘 | Sun C Z | 1995 | Journal of Astronautic Metrology and Measurement1995，15，2： | 1 |
| 19 | Photometry and colorimetry of reference LEDs by using a compact goniophotometer显示文摘 | LINDEMANN M MAASS R | 2009 | Journal of Metrology Society of India2009，24，3： | 1 |
| 20 | An Online Calibration Method for Electronic Voltage Transformers Based on IEC 61850-9-2显示文摘 | LI Zhenhuu LI Hongbin ZHANG Zhi | 2014 | Journal of Metrology Society of India2014，29，2： | 1 |
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