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| 1 | Self-calibration and Compensation of Setting Errors for Surface Profile Measurement of a Microstructured Roll Workpiece显示文摘Microstructured roll workpieces have been widely used as functional components in the precision industries.Current researches on quality control have focused on surface profile measurement of microstructured roll workpieces,and types of measurement systems and measurement methods have been developed.However,low measurement efficiency and low measurement accuracy caused by setting errors are the common disadvantages for surface profile measurement of microstructured roll workpieces.In order to shorten the measurement time and enhance the measurement accuracy,a method for self-calibration and compensation of setting errors is proposed for surface profile measurement of microstructured roll workpieces.A measurement system is constructed for the measurement,in which a precision spindle is employed to rotate the roll workpiece and an air-bearing displacement sensor with a micro-stylus probe is employed to scan the microstructured surface of the roll workpiece.The resolution of the displacement sensor is0.14 nm and that of the rotary encoder of the spindle was 0.15.Geometrical and mathematical models are established for analyzing the influences of the setting errors of the roll workpiece and the displacement sensor with respect to the axis of the spindle,including the eccentric error of the roll workpiece,the offset error of the sensor axis and the zero point error of the sensor output.Measurement experiments are carried out on a roll workpiece on which periodic microstructures are a period of 133μm along the circumferential direction.Experimental results demonstrate the feasibility of the self-compensation method.The proposed method can be used to detect and compensate the setting errors without using any additional accurate artifact. | GAO Wei XU Bin TAKEISHI Toshiki SHIMIZU Yuki ITO So | 2014 | Chinese Journal of Mechanical Engineering2014，27，1： | 3 |
| 2 | Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology显示文摘Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed. | Yuki Shimizu | 2021 | Nanomanufacturing and Metrology2021，4，1： | 3 |
| 3 | Design and construction of the motion mechanism of an XY micro-stage for precision positioning显示文摘 | Yuki Shimizu Yuxin Peng Junji Kaneko Toyohiro Azuma So Ito Wei Gao Tien-Fu Lu | 2013 | Physical2013，，： | 1 |
| 4 | Genome sequence of a no- vel virus of the species human adenovirus D associated with acute gas- troenteritis 显示文摘 | YUKI MATSUSHIMA HIDEAKI SHIMIZU | 2013 | Genome Announc2013，1，00： | 1 |
| 5 | Effects of magnetic on athcrmal and isothermal martcnsitic transformations in Fc-Ni-Cr alloys 显示文摘 | Tomoyuki Kakcshita Yoshihiro Sato Toshio Saburi Ken'ichi Shimizu Yuki Matsuoka Koichi Kindo | 1999 | Materials Transaction JIM1999，2，40： | 1 |
| 6 | Ciliary body and choroidal detachment after laser photocoagulation for diabetic retinopathy. A high-frequency ultrasound study显示文摘 | T. Yuki Y. Kimura S. Nanbu S. Kishi K. Shimizu | 1997 | Ophthalmology1997，，8： | 1 |
| 7 | Design and Construction of a Low-Force Stylus Probe for On-machlne Tool Cutting Edge Measurement显示文摘A new on-machine profiler employing a cantilever beam was proposed and developed to measure the sharp micro-cutting edges of precision cutting tools with low measuring force of 0.1 mN.The proposed profiler consists of a probe unit and a positioning unit.The probe unit employs a stylus mounted on the free end of a hollow triangular cantilever beam and a laser displacement sensor to detect the detlection of the cantilever beam.The positioning unit consists of two single-axis DC servo motor stages for precise positioning of the probe unit.The cantilever is designed with the assistance of the finite element method.In order to demonstrate the feasibility of the proposed measurement system,experiments are conducted and the measurement result for a micro-cutting edge is compared with that by a commercial profiler.Furthermore,a method to com-pensate for the measurement error caused by the lateral displacement of the cantilever beam is proposed.The compensated measurement results show good agreement within±2μm with those obtained by the commercial profler. | Hiraku Matsukuma Bo Wen Shinichi Osawa Sho Sekine Yuki Shimizu Wei Gao | 2020 | Nanomanufacturing and Metrology2020，3，4： | 1 |
| 8 | Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors显示文摘This paper presents a compact XYZ micro-stage driven by an impact driving mechanism.A moving body is translationally actuated along the X-,Y-,and Z-axes in millimeter-scale range and with nanometer-scale resolution.Cr-N thin-film strain sensors are integrated into the micro-stage for closed-loop positioning.Closed-loop control is also carried out.The motion errors in six degrees of freedom are also investigated for this micro-stage.It is clarified by analysis of finite element method that rotational motion errors around the driving axis are caused by torques due to tensions from the elastic hinges of microstage.The mechanical structure of XYZ micro-stage to cancel out the torque generated is proposed and the second prototype is fabricated.Although the rotational motion error is successfully suppressed in the second prototype,a rotational motion error of more than 0.1°remains due to remaining torque and assembly error of the elastic hinges.Then,in order to reduce the rotational motion error,the prototype is designed in which the location of elastic hinges is single-layered.By designing a mechanical structure in which torque is suppressed,all rotational motion errors are successfully reduced to less than 0.05°in the prototype with single-layer hinges. | Hiraku Matsukuma Keisuke Adachi Takuma Sugawara Yuki Shimizu Wei Gao Eiji Niwa Yoshihiro Sasaki | 2021 | Nanomanufacturing and Metrology2021，4，1： | 1 |
| 9 | Evaluation of a new immunochromatographic assay for rapid identification of influenza A, B, and A(H1N1)2009 viruses显示文摘 | Keiko Mitamura Chiharu Kawakami Hideaki Shimizu Takashi Abe Yasushi Konomi Yuki Yasumi Masahiko Yamazaki Masataka Ichikawa Norio Sugaya | 2013 | Journal of Infection and Chemotherapy2013，，4： | 1 |
| 10 | Deficiency of choresteryl ester transfer protein and gene polymorphisms of lipoprotein lipase and hepatic lipase are not associated with longevity显示文摘 | Yasymichi Arai Nobuyoshi Hirose Ken Yamamura Susumu Nakazawa Ken-ichirou Shimizu Michiyo Takayama Yoshinori Ebihara Satoki Homma Yasuyuki Gondo Yukie Masui Hiroki Inagaki | 2003 | Journal of Molecular Medicine2003，，： | 1 |
| 11 | Optimal compressive force induces bone formation via increasing bone morphogenetic proteins production and decreasing their antagonists production by Saos-2 cells显示文摘 | Narihiro Mitsui Naoto Suzuki Masao Maeno Momoko Yanagisawa Yuki Koyama Kichibee Otsuka Noriyoshi Shimizu | 2005 | Life Sciences2005，，23： | 1 |
| 12 | Precision Measurement of Carriage Slide Motion Error of a Drum Roll Lathe显示文摘 | Jung Chul Lee Wei Gao Yuki Shimizu | 2012 | Precision Engineering2012，36，2： | 1 |
| 13 | Chronic Administration of Ghrelin Improves Left Ventricular Dysfunction and Attenuates Development of Cardiac Cachexia in Rats With Heart Failure显示文摘 | Noritoshi Nagaya Masaaki Uematsu Masayasu Kojima Yoshihiko Ikeda Fumiki Yoshihara Wataru Shimizu Hiroshi Hosoda Yuki Hirota Hideyuki Ishida Hidezo Mori Kenji Kangawa | 2001 | Circulation: Journal of the American Heart Association2001，，12： | 1 |
| 14 | Design and construction of the motion mechanism of an XY micro-stage for precision positioning显示文摘 | SHIMIZU Yuki PENG Yuxin KANEKO Junji | 2013 | Sensors and Actuators A:Physical2013，201，： | 1 |
| 15 | Identification of target genes conferring ethanol stress tolerance to Saccharomyces cerevisiae based on DNA microarray data analysis显示文摘 | Takashi Hirasawa Katsunori Yoshikawa Yuki Nakakura Keisuke Nagahisa Chikara Furusawa Yoshio Katakura Hiroshi Shimizu Suteaki Shioya | 2007 | Journal of Biotechnology2007，，1： | 1 |
| 16 | Genomic characterization of a novel human adenovi-rus type 31recombinant in the hexon gene显示文摘 | Yuki Matsushima Hideaki Shimizu Tung Gia Phan etal | 2011 | J GenVirol2011，92，12： | 1 |
| 17 | Novel human adenovirus strain,Bangladesh显示文摘 | Yuki Matsushima Hideaki Shimizu Atsuko Kano etal | 2012 | Emerg Infect Dis2012，18，5： | 1 |
| 18 | Lipoprotein lipase and hepatic triglyceride lipase reduce the infectivity of hepatitis C virus (HCV) through their catalytic activities on HCV-associated lipoproteins显示文摘 | Yuko Shimizu Takayuki Hishiki Kazuo Sugiyama Kazuya Ogawa Kenji Funami Atsushi Kato Yuki Ohsaki Toyoshi Fujimoto Hiroshi Takaku Kunitada Shimotohno | 2010 | Virology2010，，1： | 1 |
| 19 | A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage显示文摘 | Xinghui Li Wei Gao Hiroshi Muto Yuki Shimizu So Ito Songyi Dian | 2013 | Precision Engineering2013，，3： | 1 |
| 20 | Positive C1q staining associated with poor renal outcome in membranoproliferative glomerulonephritis显示文摘 | Takashi Takei Mitsuyo Itabashi Takahito Moriyama Ari Shimizu Yuki Tsuruta Ayami Ochi Kayu Nakayama Chihiro Iwasaki Keiko Uchida Kosaku Nitta | 2013 | Clinical and Experimental Nephrology2013，，1： | 1 |
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