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| 1 | Non-destructive thickness characterisation of 3D multilayer semiconductor devices using optical spectral measurements and machine learning显示文摘Three-dimensional(3D)semiconductor devices can address the limitations of traditional two-dimensional(2D)devices by expanding the integration space in the vertical direction.A 3D NOT-AND(NAND)flash memory device is presently the most commercially successful 3D semiconductor device.It vertically stacks more than 100 semiconductor material layers to provide more storage capacity and better energy efficiency than 2D NAND flash memory devices.In the manufacturing of 3D NAND,accurate characterisation of layer-by-layer thickness is critical to prevent the production of defective devices due to non-uniformly deposited layers.To date,electron microscopes have been used in production facilities to characterise multilayer semiconductor devices by imaging cross-sections of samples.However,this approach is not suitable for total inspection because of the wafer-cutting procedure.Here,we propose a non-destructive method for thickness characterisation of multilayer semiconductor devices using optical spectral measurements and machine learning.For>200-layer oxide/nitride multilayer stacks,we show that each layer thickness can be non-destructively determined with an average of approximately 1.6Åroot-mean-square error.We also develop outlier detection models that can correctly classify normal and outlier devices.This is an important step towards the total inspection of ultra-high-density 3D NAND flash memory devices.It is expected to have a significant impact on the manufacturing of various multilayer and 3D devices. | Hyunsoo Kwak Sungyoon Ryu Suil Cho Junmo Kim Yusin Yang Jungwon Kim | 2021 | Light(Advanced Manufacturing)2021，2，1： | 4 |
| 2 | ClinicaJ significance of Skp2 expression, alone and combined with Jab1 and p27 in epithelial ovarian tumors显示文摘 | Suil Dong Y Watanabe Y | 2006 | Oncol Rep2006，15，4： | 1 |
| 3 | Ccurrence of arsenic contamination in Canada: Sources, behavior and distribution 显示文摘 | Suiling Wang Catherine N Mulligan O | 2006 | Science of the Total Environment2006，366，： | 1 |
| 4 | An Analysis of the Economic Consequences of the Proportitionate Liability Rule Contenprary显示文摘 | Derek K Chart and Suil Pae | 1998 | Accounting Research1998，，15： | 1 |
| 5 | Effective Visible Light-activated B-doped and B, N-codoped TiO2 photocatalysts 显示文摘 | In Suil Orlov Alexander Berg Regina | 2007 | Journal of the American Chemical Society2007，129，13： | 1 |
| 6 | Effective visible light-activated B-Doped and B, N-Codoped TiO2 photocatalysts 显示文摘 | Suil In Alexander Orlov Regina Berg | 2007 | J Am Chem Soc2007，129，13： | 1 |
| 7 | The performance of coupled(CdS: CdSe)quantum dot-sensitized TiO2 nanofibrous solar cells显示文摘 | Sudhagar P Jung June Hyuk Park Suil | 2009 | Electrochemistry Communications2009，11，11： | 1 |
| 8 | Balloons, cut-edges, matchings, and total domination in regular graphs of odd degree显示文摘 | Suil O and West D B | 2010 | J Graph Theory2010，，64： | 1 |
| 9 | Dynamic bandwidth allocation algorithm for multimedia services over Ethernet PONs显示文摘 | Suil Choi Jaedoo Huh | 2002 | ETRI Journal2002，24，6： | 1 |
| 10 | Remediation of a heavy metal-contaminated soil by a rhamnolipid foam显示文摘 | Mulligan C N Suiling W | 2006 | Engineering Geology2006，85，： | 1 |
| 11 | Occurrence of arsenic contamination in Canada:Sources,behavior and distribution显示文摘 | Suiling Wang Catherine N Mulligan | | 0，，366： | 1 |
| 12 | Mouse embryo-derived NIH3T3 fibroblasts adopt an osteoblast-like phenotype when treated with la, 25-dihydroxy vitamin D3 and dexamethasone in vitro 显示文摘 | Suil C X Scutt A M | 2002 | J Cell Physiol2002，193，2： | 1 |
| 13 | Rhamnolipid biosurfactant-enhanced soil flushing for the removal of arsenic and heavy metals from mine tailings显示文摘 | Suiling Wang Catherine N. Mulligan | 2008 | Process Biochemistry2008，，3： | 1 |
| 14 | Clinical relevance of cyclinBl overexpression in laryngeal squamous cell carcinoma显示文摘 | Dong Y SuiL Watanabe Y | 2002 | Cancer Lett2002，177，1： | 1 |
| 15 | Effective visi- ble light-activated B-doped and B, N-codoped TiO2 photo- catalysts 显示文摘 | Suil In Alexander Orlov Regina Berg | 2007 | Journal of the American Chemical Society2007，129，13： | 1 |
| 16 | Occurrence of Arsenic Contamination in Canada: Sources,Behavior and Distribution显示文摘 | Wang Suiling Catherine N Mulligan | 2006 | Science of the Total Environment2006，366，： | 1 |
| 17 | Natural attenuation processes for remediation of arsenic contaminated soils and groundwater 显示文摘 | Suiling Wang Catherine N Mulligan | 2006 | Journal of Hazardous Materials B2006，138，： | 1 |
| 18 | Strategic Interactionin Auditing:An Analysis of Auditors' Legal Liability,Internal Control System Quality,and Audit Effort显示文摘 | Seung-Weon Yoo | 2001 | TheAccounting Review2001，，： | 1 |
| 19 | Effective visible light-activated B-doped and B, N-codoped TiO2 photocatalysts 显示文摘 | In Suil Orlov Alexander Berg Regina | 2007 | J Am Chem Soc2007，129，13： | 1 |
| 20 | Natural attenuation processes for remediation of arsenic contaminated soils and groundwater显示文摘 | Catherine N Mulligan | 2006 | Journal of Hazardous Materials B2006，138，： | 1 |
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