| 2 | Advanced operation of heated fluidic resonators via mechanical and thermal loss reduction in vacuum显示文摘For simultaneous and quantitative thermophysical measurements of ultrasmall liquid volumes,we have recently developed and reported heated fluidic resonators(HFRs).In this paper,we improve the precision of HFRs in a vacuum by significantly reducing the thermal loss around the sensing element.A vacuum chamber with optical,electrical,and microfluidic access is custom-built to decrease the convection loss by two orders of magnitude under 10-4 mbar conditions.As a result,the measurement sensitivities for thermal conductivity and specific heat capacity are increased by 4.1 and 1.6 times,respectively.When differentiating between deionized water(H2O)and heavy water(D2O)with similar thermophysical properties and~10%different mass densities,the signal-to-noise ratio(property differences over standard error)for H2O and D2O is increased by 9 and 5 times for thermal conductivity and specific heat capacity,respectively. | Juhee Ko Bong Jae Lee Jungchul Lee | 2023 | Microsystems & Nanoengineering2023，9，5： | 0 |
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