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22篇 您的检索式:作者名="LIU Caichi"
    题名 作者 年代 出处 被引量
1Investigation of Oxygen Precipitation and Intrinsic Gettering in Heavily Sb-doped Silicon显示文摘Caichi Liu Qiuyan Hao 2003Microelectronic Engineering2003,66,:1
2The influence of casting polysilicon performance by rapid heat treatment 显示文摘Chen Yuwu Hao Qiuyan Liu Caichi 2008Transactions of Materials and Heat Treatment2008,29,5:1
3显示文摘Xu Yuesheng Liu Caichi Wang Haiyun 2003J Microelectronic Engineering2003,66,:1
4Growth of Czochralski silicon under magnetic field显示文摘Growth of Czochralski (CZ) silicon crystals under the magnetic field induced by a cusp-shaped permanent magnet of NdFeB has been investigated. It is found that the mass transport in silicon melt was controlled by its diffusion while the magnetic intensity at the edge of a crucible was over 0.15 T. In comparison with the growth of conventional CZ silicon without magnetic field, the resistivity homogeneity of the CZ silicon under the magnetic field was improved. Furthermore, the Marangoni convection which has a significant influence on the control of oxygen concentration was observed on the surface of silicon melt. It is suggested that the crystal growth mechanism in magnetic field was similar to that in micro-gravity if a critical value was reached, named the growth of equivalent micro-gravity. The relationship of the equivalent micro-gravity and the magnetic intensity was derived as g=(v0/veff)g0. Finally, the orders of the equivalent micro-gravity corresponding to two crucibles with characteristic sizes were calculated.XU Yuesheng LIU Caichi WANG Haiyun ZHANG Weilian YANG Qingxin LI Yangxian REN Binyan LIU Fugui 2004Science China(Technological Sciences)2004,47,3:1
5Fast neutron irradiation for Czochralski grown silicon显示文摘XU Yueshcng LI Yangxian LIU Caichi 1994Appl Phys Lett1994,65,22:1
6Growth of Czochralski silicon under magnetic field 显示文摘Xu Yuesheng Liu Caichi Wang Haiyun 2004Science in China Ser E Technological Sciences2004,47,1:1
7Fast neutron irradiation for CZ-Si 显示文摘Xu Yuesheng Li Yangxian Liu Caichi 1994Appl Phys Lett1994,65,:1
8Microstructure of flow pattern defects in boron-doped Czochralski-grown silicon显示文摘The morphology and microstructure of flow pattern defects (FPDs) in lightly boron-doped Czochralski-grown silicon (Cz-Si) crystals were investigated using optical microscopy and atomic force microscopy. The experimental results showed that the morphology of FPDs was parabola-like with several steps. Single-type and dual-type voids were found on the tip of FPDs and two heaves exist on the left and right sides of the void. All the results have proved that FPDs were void-type defects. These results are very useful to investigate FPDs in Cz-Si wafers further and explain the annihilation of FPDs during high-temperature annealing.LIU Caichi HAO Qiuyan ZHANG Jianfeng TENG Xiaoyun Sun Shilong Qigang Zhou WANG Jing XIAO Qinghua 2006Rare Metals2006,25,4:1
9The marangoni convection and the oxygen conectration in Czochralski-grown Silicon 显示文摘Xu Yuesheng Liu Caichi Wang Haiyun 2003J Crystal Growth2003,254,:1
10Formation and removement mechanism of haze defects on (111) p-type silicon wafer 显示文摘Xu Yuesheng Li Yangxian Liu Caichi 1994Rare Metals1994,13,1:1
11Determination of oxygen concertration in heavily Sb-doped silicon by means ofCERDA 显示文摘Xu Yuesheng Liu Caichi Li Yangxian 1994J Crystal Growth1994,144,:1
12Growth ofsemiconductor crystal under the equivalent micro-gravity 显示文摘Xu Yuesheng Liu Caichi Wang Haiyun 2003J Microelectronic Engineering2003,66,:1
13Determination of oxygen concentration in heavily Sb-doped silicon by means ofCERDA 显示文摘Xu Yuesheng Liu Caichi Li Yangxian 1994J Cryst Growth1994,,144:1
14Formation and Removement Mechanism of Haze defects on (111) p-type Silicon Wafer 显示文摘Xu Yuesheng Li Yangxian Liu Caichi 1994RareMetals1994,13,1:1
15Investigation of flow pattern defects in as-grown and rapid thermal annealed CZSi wafers 显示文摘Zhang Jianfeng Liu Caichi Zhou Qigang 2004Journal of Crystal Growth2004,262,:1
16The development of the study on selectively growth ofGaN显示文摘ZHANG Wei LIU Caichi HAO Qiuyan 2007Semicond Technol2007,32,2:1
17Study on the oxygen concentration reduction in heavily Sb-doped silicon 显示文摘Liu Caichi Wang Hongmei Li Yangxian 1999J Cryst Growth1999,,196:1
18Fast neutron irradiation for Czochralski growth silicon 显示文摘Xu Yuesheng Li Yangxian Liu Caichi 1994Appl Phys Lett1994,65,22:1
19Microstructure of flow pattern defects in boron-doped Czochralski-grown silicon显示文摘The morphology and microstructure of flow pattern defects (FPDs) in lightly boron-doped Czochralski-grown silicon (Cz-Si) crystals were investigated using optical microscopy and atomic force microscopy. The experimental results showed that the morphology of FPDs was parabola-like with several steps. Single-type and dual-type voids were found on the tip of FPDs and two heaves exist on the left and right sides of the void. All the results have proved that FPDs were void-type defects. These results are very useful to investigate FPDs in Cz-Si wafers further and explain the annihilation of FPDs during high-temperature annealing.LIU Caichi HAO Qiuyan ZHANG Jianfeng TENG Xiaoyun Sun Shilong QigangZhou WANG Jing XIAO Qinghua 2006北京科技大学学报2006,28,8:0
20Effect of oxygen precipitates in solar grade silicon on minority carrier lifetime and efficiency of solar cells显示文摘The effect of oxygen precipitates on minority carrier lifetime and performance of solar cell was studied by means of Fourier Transform Infrared Spectroscopy (FTIR), quasi-steady state photoconductance (QSSPCD), optical microscope, spectrum response and solar cell efficiency test. The minority carrier lifetime and performance of solar cell reduced depend on oxygen precipitates. A few of oxygen precipitates have formed after single-step annealing; and they do not impact the efficiency dramatically. Pre-annealing at 650 ℃ for 4 h enhances the oxygen precipitation when it is subjected to middle temperature annealing. The solar cells performance decayed sharply. Especially annealing at 950 ℃ for 3 h, the Vos and Isc of cells decrease 12% and 25% respectively. Few oxygen precipitates have formed in silicon after high temperature annealing at about 1050 ℃ whether pre-annealing is used or not, and the performance of cells is not be affected.SUN Haizhi LIU Caichi HAO Qiuyan WANG Lijian 2006Rare Metals2006,25,z1:0
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