5篇
您的检索式：作者名="ZHOU ZaiFa"
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| 1 | A novel 3D dynamic cellular automata model for photoresist-etching process simulation显示文摘 | ZHOU Zaifa HUANG Qing'an LI Weihua Lu Wei | 2007 | IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems2007，26，： | 1 |
| 2 | Modeling and simulations of anisotropic etching of silicon in alkaline solutions with experimental verification 显示文摘 | ZHOU Zaifa HUANG Qingan | 2009 | J Electrochem Soc2009，156，2： | 1 |
| 3 | Numerical study on photoresist etching processes based on a cellular automata model显示文摘For the three-dimensional (3-D) numerical study of photoresist etching processes, the 2-D dynamic cellular automata (CA) model has been successfully extended to a 3-D dynamic CA model. Only the boundary cells will be processed in the 3-D dy-namic CA model and the structure of “if-else” description in the simulation pro-gram is avoided to speed up the simulation. The 3-D dynamic CA model has found to be stable, fast and accurate for the numerical study of photoresist etching processes. The exposure simulation, post-exposure bake (PEB) simulation and etching simulation are integrated together to further investigate the performances of the CA model. Simulation results have been compared with the available ex-perimental results and the simulations show good agreement with the available experiments. | ZHOU ZaiFa HUANG QingAn LI WeiHua LU Wei | 2007 | Science China(Technological Sciences)2007，50，1： | 0 |
| 4 | Non-contact biomimetic mechanism for selective hydrogenation of nitroaromatics on heterogeneous metal nanocatalysts显示文摘While the enzymatic reduction of unsaturated compounds usually has high specificity,highly selective reduction processes are hardly realized by heterogeneous industrial catalysts,which is critical for the green production of many fine chemicals.Here,we report an unexpected discovery of a biomimetic behavior of dicyandiamide(DICY)-modified Pt nanocatalysts for the green hydrogenation of a wide range of nitroaromatics.We demonstrate that the surface modification by DICY not only prevents the direct contact of nitroaromatic reactants with Pt surface but also induces an effective non-contact hydrogenation mechanism mediated by protons and electrons.In such a process,the DICY layer serves as a“semi-permeable membrane”to allow the permeation of H_(2) molecules for being activated into electrons and protons at the Pt-DICY interface.With the generation of separated protons and electrons,the nitro group with strong electrophilic properties can be hydrogenated through the electron transfer followed by the proton transfer,which is facilitated by the hydrogen bonding network formed by protonated DICY.The unique mechanism makes it highly directional toward the hydrogenation of nitro groups without side reactions.Owing to its capability to largely eliminate the waste generation,the developed Pt-DICY catalysts have been successfully applied for the green industrial production of many important aniline intermediates. | Wenting Zhou Laiyang Li Ruixuan Qin Jiaxin Zhu Shengjie Liu Shiguang Mo Zaifa Shi Huihuang Fang Pengpeng Ruan Jun Cheng Gang Fu Nanfeng Zheng | 2022 | Science China Chemistry2022，65，4： | 0 |
| 5 | Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films显示文摘A novel test structure to characterize the fracture strength of MEMS(Micro-electro-Mechanical Systems)thin films is presented.The test structure is comprised of a micro fabricated chevron-shaped thermal actuator and test specimen.The test structure is capable of producing large displacement and stresswhile keeping a relatively low temperature gradient across the test specimen.A voltage is applied across the beams of the chevron-shaped actuator,producing thermal expansion force to fracture the test specimen.Actuator deflection is computed based on elastic analysis of structures.To verify the test structure,simulations have been implemented using COMSOL Multiphysics.A 620μmlong,410μm wide,10μm thick test structure produced stress of 7.1 GPawhile the applied voltage is 5 V.The results indicate that the test structure is suitable for in-situ measurement of the fracture strength of MEMS thin films. | Mengjie Li Zaifa Zhou Liyan Yi Xijie Wang Saeed Adnan | 2019 | Nanotechnology and Precision Engineering2019，2，4： | 0 |
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