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| 1 | Magnetic manganese-based composites with multiple loss mechanisms towards broadband absorption显示文摘The weak dielectric properties and the lack of magnetic loss of manganese-based absorbers are obstructed as the new generation of electromagnetic wave absorption(EMA)materials applying in microelectronic devices.Herein,the sulfuration and subsequent compounding strategies have been employed to enhance the EMA performance of multi-shell nanosphere-shaped Mn_(2)O_(3)materials.With the narrow bandgap,the as-obtained MnS possesses reinforced electrical conductivity,which is conducive to conductivity loss.More importantly,the presence of potential difference between different phases will form space charge region at the heterogeneous interface,thus favoring interfacial polarization.Additionally,the improvement of magnetic loss is attributed to the presence of Co_(3)O_(4)nanoparticles.Consequently,the composites present enhanced EMA performance than original Mn_(2)O_(3).Specifically,the minimum reflection loss of as-prepared composites is−51.4 dB at the thickness of 1.8 mm and the broad effective absorption bandwidth reaches 6.2 GHz at 1.9 mm.The low matching thickness and high absorption efficiency in this work can provide a convincing reference when designing distinguished manganese-based absorbers. | Yue Liu Zirui Jia Qianqian Zhan Yuhao Dong Qimeng Xu Guanglei Wu | 2022 | Nano Research2022，15，6： | 6 |
| 2 | Soil erosion assessment by RUSLE with improved P factor and its validation:Case study on mountainous and hilly areas of Hubei Province,China显示文摘The Revised Universal Soil Loss Equation(RUSLE)is widely used to estimate regional soil erosion.However,quantitative impacts of soil and water conservation(SWC)measures on conservation practice factor(P)of the RUSLE remain largely unclear,especially for the mountainous and hilly areas.In this study,we improved the RUSLE by considering quantitative impacts of different SWC measures on the P factor value.The improved RUSLE was validated against the long-term(2000-2015)soil erosion monitoring data obtained from 96 runoff plots(15—35°)in mountainous and hilly areas of Hubei Province,China;the result presented a high accuracy with the determination coefficient of 0.89.Based on the erosion monitoring data of 2018 and 2019,the Root Mean Square Error of the result by the improved RUSLE was 28.0%smaller than that by the original RUSLE with decrement of 19.6%—24.0%in the average P factor values,indicating that the soil erosion modelling accuracy was significantly enhanced by the improved RUSLE.Relatively low P factor values appeared for farmlands with tillage measures(P<0.53),grasslands with engineering measures(P<0.23),woodlands with biological measures(P<0.28),and other land use types with biological measures(P<0.51).The soil erosion modulus showed a downward trend with the corresponding values of 1681.21,1673.14,1594.70,1482.40 and 1437.50 t km^(-2)a-1 in 2000,2005,2010,2015 and 2019,respectively.The applicability of the improved RUSLE was verified by the measurements in typical mountainous and hilly areas of Hubei Province,China,and arrangements of SWC measures of this area were proposed. | Pei Tian Zhanliang Zhu Qimeng Yue Yi He Zhaoyi Zhang Fanghua Hao Wenzhao Guo Lin Chen Muxing Liu | 2021 | International Soil and Water Conservation Research2021，9，3： | 4 |
| 3 | Indiscriminate ssDNA cleavage activity of CRISPR-Cas12a induces no detectable off-target effects in mouse embryos显示文摘Dear Editor,Newly discovered characteristics like'collateral effect'or trans-cleavage in CRISPR-Cas13 and CRISPR-Cas12 systems have enabled their usage in nucleic acid detection(Gootenberg et al.2017,2018;Chen et al.2018).The collateral RNA cleavage of Cas13a has been reported to be harmful for cell development(Wang et al.2019;Buchman et al.2020).As a representative gene editor of CRISPR-Cas12 system,CRISPR-Cas12a(Cpf1)holds great potential for therapeutic applications in the future(Zetsche et al.2015;Koo et al.2018;Campa et al.2019). | Yu Wei Yingsi Zhou Yajing Liu Wenqin Ying Ruiming Lv Qimeng Zhao Haibo Zhou Erwei Zuo Yidi Sun Hui Yang Changyang Zhou | 2021 | Protein & Cell2021，12，9： | 2 |
| 4 | CasRx-mediated RNA targeting prevents choroidal neovascularization in a mouse model of age-related macular degeneration显示文摘RNA-targeting CRISPR system Cas13 offers an efficient approach for manipulating RNA transcripts in vitro.In this perspective,we provide a proof-of-concept demonstration that Cas13-mediated Vegfa knockdown in vivo could prevent the development of laser-induced CNV in mouse model of Age-related macular degeneration. | Changyang Zhou Xinde Hu Cheng Tang Wenjia Liu Shaoran Wang Yingsi Zhou Qimeng Zhao Qiyu Bo Linyu Shi Xiaodong Sun Haibo Zhou Hui Yang | 2020 | National Science Review2020，7，5： | 2 |
| 5 | H7N9 Influenza Viruses Are Transmissible in Ferrets by Respiratory Droplet显示文摘 | Qianyi Zhang Jianzhong Shi Guohua Deng Jing Guo Xianying Zeng Xijun He Huihui Kong Chunyang Gu Xuyong Li Jinxiong Liu Guojun Wang Yan Chen Liling Liu Libin Liang Yuanyuan Li Jun Fan Jinliang Wang Wenhui Li Lizheng Guan Qimeng Li Huanliang Yang Pucheng Che | 2013 | Science2013，，6144： | 1 |
| 6 | Instability of parasitic capacitance in T-shape-gate enhancementmode AlGaN/GaN MIS-HEMTs显示文摘Parasitic capacitances associated with overhangs of the T-shape-gate enhancement-mode(E-mode)GaN-based power device,were investigated by frequency/voltage-dependent capacitance-voltage and inductive-load switching measurements.The overhang capacitances induce a pinch-off voltage distinguished from that of the E-mode channel capacitance in the gate capacitance and the gatedrain capacitance characteristic curves.Frequency-and voltage-dependent tests confirm the instability caused by the trapping of interface/bulk states in the LPCVD-SiNx passivation dielectric.Circuit-level double pulse measurement also reveals its impact on switching transition for power switching applications. | Lan Bi Yixu Yao Qimeng Jiang Sen Huang Xinhua Wang Hao Jin Xinyue Dai Zhengyuan Xu Jie Fan Haibo Yin Ke Wei Xinyu Liu | 2022 | Journal of Semiconductors2022，43，3： | 1 |
| 7 | A Hu sheep genome with the first ovine Y chromosome reveal introgression history after sheep domestication显示文摘The Y chromosome plays key roles in male fertility and reflects the evolutionary history of paternal lineages.Here,we present a de novo genome assembly of the Hu sheep with the first draft assembly of ovine Y chromosome(o MSY),using nanopore sequencing and Hi-C technologies.The o MSY that we generated spans 10.6 Mb from which 775 Y-SNPs were identified by applying a large panel of whole genome sequences from worldwide sheep and wild Iranian mouflons.Three major paternal lineages(HY1a,HY1b and HY2)were defined across domestic sheep,of which HY2 was newly detected.Surprisingly,HY2 forms a monophyletic clade with the Iranian mouflons and is highly divergent from both HY1a and HY1b.Demographic analysis of Y chromosomes,mitochondrial and nuclear genomes confirmed that HY2 and the maternal counterpart of lineage C represented a distinct wild mouflon population in Iran that diverge from the direct ancestor of domestic sheep,the wild mouflons in Southeastern Anatolia.Our results suggest that wild Iranian mouflons had introgressed into domestic sheep and thereby introduced this Iranian mouflon specific lineage carrying HY2 to both East Asian and Africa sheep populations. | Ran Li Peng Yang Ming Li Wenwen Fang Xiangpeng Yue Hojjat Asadollahpour Nanaei Shangquan Gan Duo Du Yudong Cai Xuelei Dai Qimeng Yang Chunna Cao Weidong Deng Sangang He Wenrong Li Runlin Ma Mingjun Liu Yu Jiang | 2021 | Science China(Life Sciences)2021，64，7： | 1 |
| 8 | H7N9 Influenza Viruses Are Transmissible in Ferrets by Respiratory Droplet显示文摘 | Qianyi Zhang Jianzhong Shi Guohua Deng Jing Guo Xianying Zeng Xijun He Huihui Kong Chunyang Gu Xuyong Li Jinxiong Liu Guojun Wang Yan Chen Liling Liu Libin Liang Yuanyuan Li Jun Fan Jinliang Wang Wenhui Li Lizheng Guan Qimeng Li Huanliang Yang Pucheng Che | 2013 | Science2013，，6144： | 1 |
| 9 | Immunosenescence:molecular mechanisms and diseases显示文摘Infection susceptibility,poor vaccination efficacy,age-related disease onset,and neoplasms are linked to innate and adaptive immune dysfunction that accompanies aging(known as immunosenescence).During aging,organisms tend to develop a characteristic inflammatory state that expresses high levels of pro-inflammatory markers,termed inflammaging.This chronic inflammation is a typical phenomenon linked to immunosenescence and it is considered the major risk factor for age-related diseases.Thymic involution,naïve/memory cell ratio imbalance,dysregulated metabolism,and epigenetic alterations are striking features of immunosenescence.Disturbed T-cell pools and chronic antigen stimulation mediate premature senescence of immune cells,and senescent immune cells develop a proinflammatory senescence-associated secretory phenotype that exacerbates inflammaging.Although the underlying molecular mechanisms remain to be addressed,it is well documented that senescent T cells and inflammaging might be major driving forces in immunosenescence.Potential counteractive measures will be discussed,including intervention of cellular senescence and metabolic-epigenetic axes to mitigate immunosenescence.In recent years,immunosenescence has attracted increasing attention for its role in tumor development.As a result of the limited participation of elderly patients,the impact of immunosenescence on cancer immunotherapy is unclear.Despite some surprising results from clinical trials and drugs,it is necessary to investigate the role of immunosenescence in cancer and other age-related diseases. | Zaoqu Liu Qimeng Liang Yuqing Ren Chunguang Guo Xiaoyong Ge Libo Wang Quan Cheng Peng Luo Yi Zhang Xinwei Han | 2023 | Signal Transduction and Targeted Therapy2023，8，6： | 1 |
| 10 | Func- tional MnO nanoclusters for efficient siRNA delivery 显示文摘 | Xing Ruijun Liu Gang Quan Qimeng | 2011 | Chemical Communications2011，47，12： | 1 |
| 11 | Xenopus GLP-1-based glycopeptides as dual glucagon-like peptide 1 receptor/glucagon receptor agonists with improved in vivo stability for treating diabetes and obesity显示文摘Peptide dual agonists toward both glucagon-like peptide 1 receptor(GLP-1R)and glucagon receptor(GCGR)are emerging as novel therapeutics for the treatment of type 2 diabetes mellitus(T2DM)patients with obesity.Our previous work identified a Xenopus GLP-1-based dual GLP-1R/GCGR agonist termed xGLP/GCG-13,which showed decent hypoglycemic and body weight lowering activity.However,the clinical utility of xGLP/GCG-13 is limited due to its short in vivo half-life.Inspired by the fact that O-GlcNAcylation of intracellular proteins leads to increased stability of secreted proteins,we rationally designed a panel of O-GlcNAcylated xGLP/GCG-13 analogs as potential long-acting GLP-1R/GCGR dual agonists.One of the synthesized glycopeptides 1f was found to be equipotent to xGLP/GCG-13 in cell-based receptor activation assays.As expected,O-GlcNAcylation effectively improved the stability of xGLP/GCG-13 in vivo.Importantly,chronic administration of 1f potently induced body weight loss and hypoglycemic effects,improved glucose tolerance,and normalized lipid metabolism and adiposity in both db/db and diet induced obesity(DIO)mice models.These results supported the hypothesis that glycosylation is a useful strategy for improving the in vivo stability of GLP-1-based peptides and promoted the development of dual GLP-1R/GCGR agonists as antidiabetic/antiobesity drugs. | LI Qiang YANG Qimeng HAN Jing LIU Xiaohan FU Junjie YIN Jian | 2022 | Chinese Journal of Natural Medicines2022，20，11： | 1 |
| 12 | Host defense peptide-mimicking peptide polymer-based antibacterial hydrogel enables efficient healing of MRSA-infected wounds显示文摘Wound infections are a compelling health issue caused by the invasion and proliferation of pathogens in wound sites.Antibioticloaded hydrogels are widely used to achieve anti-infectious wound healing.However,due to the quick emergence of drugresistant bacteria,such as methicillin-resistant Staphylococcus aureus(MRSA),wound infection has been a formidable challenge to human health.To address MRSA-infected wounds,an antibacterial peptide polymer-loaded hyaluronic acid(HA)hydrogel(Gel-HA@P)is prepared.The peptide polymer is designed to mimic host defense peptides as the antibiotic alternative showing potent antibacterial activity,low susceptibility to drug resistance and good stability against proteolysis.HA is biocompatible and biodegradable hydrogel substrate as a primary constituent of the extracellular matrix and suitable for cell migration and wound healing.Gel-HA@P shows potent activity against MRSA in vitro and in vivo,low toxicity during the treatment and promotes the wound healing in vivo.This design has proven to be an effective and antibiotic-free strategy to enable the healing of MRSA-infected wounds. | Zhongqian Qiao Wenjing Zhang Yueming Wu Weinan Jiang Ning Shao Jiayang Xie Guixue Xia Qimeng Chen Zhefeng Liu Jingcheng Zou Jiawei Gu Shifang Luan Haodong Lin Runhui Liu | 2023 | Science China Chemistry2023，66，6： | 1 |
| 13 | Influence of sodium dodecyl sulfate coating on adsorption of methylene blue by biochar from aqueous solution显示文摘Biochar is regarded as a promising new class of materials due to its multifunctional character and the possibility of effectively coupling different properties. With increasing introduction into the environment, environmental chemicals such as surfactants will load onto the released biochar and change its physicochemical characteristics and adsorption behavior toward pollutants. In this study, sodium dodecyl sulfate(SDS), as one type of anionic surfactant, was coated onto biochar with different loading amounts. The influence of SDS loading onto biochar's physicochemical properties were investigated by Fourier transform infrared(FT-IR) spectroscopy, elemental analysis, zeta potential and Brunauer–Emmett–Teller(BET) surface area and pore size distribution analysis. Results showed that the pore size of the biochar decreased gradually with the increase of SDS loading because of the surface-adsorption and pore-blocking processes; the p H of the point of zero charge(pHPZC) decreased with increasing SDS loading. Although surface-coating with SDS decreased the pore size of the biochar, its adsorption capacity toward Methylene Blue(MB) significantly increased. The biochar-bound SDS introduced functional groups and negative charges to the biochar surface, which could thus enhance the adsorption of MB via hydrogen bonding and electrostatic interaction. The results can shed light on the underlying mechanism of the influence of anionic surfactants on the adsorption of MB by biochar. | Wei Que Luhua Jiang Chen Wang Yunguo Liu Zhiwei Zeng Xiaohua Wang Qimeng Ning Shaoheng Liu Peng Zhang Shaobo Liu | 2018 | Journal of Environmental Sciences2018，30，8： | 1 |
| 14 | Reliability and validity of the Chinese version of the PedsQL Multidimensional Fatigue Scale in children with acute leukemia显示文摘Background:The PedsQL Multidimensional Fatigue Scale(PedsQL^(TM)MFS)is widely used to rate fatigue in children living in English-speaking countries.However,insufficient instruments are available to conduct parallel assessment on fatigue in parents and children in China.In this regard,an appropriate measurement method must be developed.Objectives:This study aims to determine the reliability and validity of the Chinese-language PedsQL^(TM)MFS.Methods:Children with cancer(n=125)and their parents were surveyed in Guangzhou,China.The parents of children aged 2e4 years completed the PedsQL^(TM)MFS proxy reports,whereas the other children and their parents completed the questionnaires by themselves.Results:The PedsQL^(TM)MFS-Chinese version demonstrated satisfactory internal consistency reliability(child self-report Cronbach's a=0.87;parent self-report Cronbach's a=0.93).The factor loadings of the items ranged from 0.78 to 0.87 for general fatigue,0.56e0.78 for sleep/rest fatigue,and 0.62e0.89 for cognitive fatigue.Conclusion:This study proves that the PedsQL^(TM)MFS-Chinese version is an effective tool for screening fatigue in Chinese children with cancer. | Qimeng Ye Ke Liu Jun Wang Xiuqing Bu Lili Zhao | 2016 | International Journal of Nursing Sciences2016，3，2： | 0 |
| 15 | Constructing oxygen-deficient V_(2)O_(3)@C nanospheres for high performance potassium ion batteries显示文摘Potassium ion batteries(PIBs) have been regarded as promising alternatives to lithium ion batteries(LIBs)on account of their abundant resource and low cost in large scale energy storage applications. However,it still remains great challenges to explore suitable electrode materials that can reversibly accommodate large size of potassium ions. Here, we construct oxygen-deficient V_(2)O_(3)nanoparticles encapsulated in amorphous carbon shell(Od-V_(2)O_(3)@C) as anode materials for PIBs by subtly combining the strategies of morphology and deficiency engineering. The MOF derived nanostructure along with uniform carbon coating layer can not only enables fast K+migration and charge transfer kinetics, but also accommodate volume change and maintain structural stability. Besides, the introduction of oxygen deficiency intrinsically tunes the electronic structure of materials according to DFT calculation, and thus lead to improved electrochemical performance. When utilized as anode for PIBs, Od-V_(2)O_(3)@C electrode exhibits superior rate capability(reversible capacities of 262.8, 227.8, 201.5, 179.8, 156.9 mAh/g at 100, 200, 500, 1000 and2000 mA/g, respectively), and ultralong cycle life(127.4 mAh/g after 1000 cycles at 2 A/g). This study demonstrates a feasible way to realize high performance PIBs through morphology and deficiency engineering. | Qiang Deng Luolan Wang Jing Li Qian Cheng Xiaozhao Liu Changdong Chen Qimeng Zhang Wentao Zhong Hua Wang Lijue Wu Chenghao Yang | 2023 | Chinese Chemical Letters2023，34，3： | 0 |
| 16 | High-performance enhancement-mode GaN-based p-FETs fabricated with O_(3)-Al_(2)O_(3)/HfO_(2)-stacked gate dielectric显示文摘In this letter,an enhancement-mode(E-mode)GaN p-channel field-effect transistor(p-FET)with a high current den-sity of−4.9 mA/mm based on a O_(3)-Al_(2)O_(3)/HfO_(2)(5/15 nm)stacked gate dielectric was demonstrated on a p++-GaN/p-GaN/AlN/AlGaN/AlN/GaN/Si heterostructure.Attributed to the p++-GaN capping layer,a good linear ohmic I−V characteristic fea-turing a low-contact resistivity(ρc)of 1.34×10^(−4)Ω·cm^(2) was obtained.High gate leakage associated with the HfO_(2)high-k gate dielectric was effectively blocked by the 5-nm O_(3)-Al_(2)O_(3)insertion layer grown by atomic layer deposition,contributing to a high ION/IOFF ratio of 6×10^(6)and a remarkably reduced subthreshold swing(SS)in the fabricated p-FETs.The proposed structure is compelling for energy-efficient GaN complementary logic(CL)circuits. | Hao Jin Sen Huang Qimeng Jiang Yingjie Wang Jie Fan Haibo Yin Xinhua Wang Ke Wei Jianxun Liu Yaozong Zhong Qian Sun Xinyu Liu | 2023 | Journal of Semiconductors2023，44，10： | 0 |
| 17 | Oxygen-doped Carbon Nitride Nanocages with Efficient Photon-to-Electron Conversion for Selective Oxidation of Xylose/Xylan to Yield Xylonic Acid显示文摘Highly efficient photon-to-electron conversion is crucial for achieving photocatalytic conversion.In this study,oxygen-doped carbon nitride nanocages(O@CNNCs)were engineered via dual strategies of morphology-controlled heteroatom doping,which was successfully used in the photocatalytic selective oxidation of xylose/xylan to xylonic acid.The nanocage-shaped O@CNNCs had a larger surface area,which was 4.02 times of carbon nitride(CN).Furthermore,with the assistance of morphology regulation and O-doping,O@CNNCs exhibit highly efficient photon-to-electron conversion,enhanced visible-light utilization,high photocurrent,low resistance,and fast separation/migration of electron-hole pairs.Correspondingly,the photocatalytic oxidation of xylose to xylonic acid using O@CNNCs was successfully achieved under mild reaction conditions with a yield of 83.4%.O@CNNCs have excellent recyclability,in which the yield of xylonic acid in the 5th cycle was 98.2%of its initial use.The O@CNNC photocatalytic system was also suitable for macromolecular xylan,and a xylonic acid yield of 77.34 mg was obtained when 100 mg xylan was used.The oxidation-active species captured experiments indicated that holes were crucial for the selective oxidation of xylose to xylonic acid.Overall,this study provides a new strategy for the preparation of photocatalysts with excellent photon-to-electron conversion and selective oxidation of biomass-derived feedstocks to xylonic acid. | Junqiang Zhang Zhuoyan Xie Zulfiqar Ali Ning Li Qimeng Liu Wenyue Fan Jiliang Ma Runcang Sun | 2023 | Paper And Biomaterials2023，8，2： | 0 |
| 18 | A novel one-time-programmable memory unit based on Schottky-type p-GaN diode显示文摘In this work,a novel one-time-programmable memory unit based on a Schottky-type p-GaN diode is proposed.During the programming process,the junction switches from a high-resistance state to a low-resistance state through Schottky junction breakdown,and the state is permanently preserved.The memory unit features a current ratio of more than 10^(3),a read voltage window of 6 V,a programming time of less than 10^(−4)s,a stability of more than 108 read cycles,and a lifetime of far more than 10 years.Besides,the fabrication of the device is fully compatible with commercial Si-based GaN process platforms,which is of great significance for the realization of low-cost read-only memory in all-GaN integration. | Chao Feng Xinyue Dai Qimeng Jiang Sen Huang Jie Fan Xinhua Wang Xinyu Liu | 2024 | Journal of Semiconductors2024，45，3： | 0 |
| 19 | A likely autotetraploidization event shaped the Chinese mahogany(Toona sinensis)genome显示文摘Chinese mahogany(Toona sinensis) is of considerable medical and economic importance, and its genome has been deciphered. However, the process underlying its polyploidy is unclear, and the chromosomal evolutionary trajectory is poorly understood. Here, by reanalysing the T.sinensis genome, we found evidence of a tetraploidization event(T. sinensis special tetraploidization, TST) that occurred approximately 15-17 million years ago(MYA) after the core eudicot-common hexaploidization(ECH or gamma) event. We characterized the synonymous nucleotide substitution rates(Ks values) of collinear genes and found that T. sinensis genes affected by the TST evolve at a slower rate than Acer yangbiense genes. Furthermore, we identified homologous genes related to polyploidization and speciation and constructed multiple alignments with different reference genomes. Notably, the significant balance of gene retention and loss characterized in the two TST-derived subgenomes suggests an autopolyploid nature of the TST. Moreover, we deduced the chromosomal karyotypes of the two subgenomes and identified 7chromosomal fusions that have shaped the T. sinensis genome;more information is available on a newly constructed karyotype platform(http://gffzze84c5b42976d4cd7hxqcpcwwcnup965kb.ffgz.tsg.suse.edu.cn/Toona_sinensis/index.html). The T. sinensis genome preserves the ancestral chromosome structure of dicotyledons well and could serve as a good reference for understanding genomic changes in other Meliaceae and Sapindales plants. In addition, we verified that tandem duplication and the ECH have promoted the expansion of terpene synthase(TPS) genes;conversely, the TST seems to have inhibited expansion of these genes. This present effort has clarified the polyploidy events of the T. sinensis genome, filled gaps in the history of karyotype evolution, and laid a solid foundation for further genomic studies in the Meliaceae research community and beyond. | Jianyu Wang Ziyi Yang Tianyu Lei Yan Zhang Qimeng Xiao Zijian Yu Jiaqi Zhang Sangrong Sun Qiang Xu Shaoqi Shen Zimo Yan Mengnan Fang Yue Ding Zihan Liu Qianwen Zhu Ke Ren Yuxin Pan Haibin Liu Jinpeng Wang | 2023 | Horticultural Plant Journal2023，9，2： | 0 |
| 20 | Nondestructive monitoring of annealing and chemical-mechanical planarization behavior using ellipsometry and deep learning显示文摘The Cu-flling process in through-silicon via(TSV-Cu)is a key technology for chip stacking and three-dimensional vertical packaging.During this process,defects resulting from chemical-mechanical planarization(CMP)and annealing severely affect the reliability of the chips.Traditional methods of defect characterization are destructive and cumbersome.In this study,a new defect inspection method was developed using Mueller matrix spectroscopic ellipsometry.TSV-Cu with a 3-μm-diameter and 8-μm-deep Cu filling showed three typical types of characteristics:overdishing(defect-OD),protrusion(defect-P),and defect-free.The process dimension for each defect was 13 nm.First,the three typical defects caused by CMP and annealing were investigated.With single-channel deep learning and a Mueller matrix element(MME),the TSV-Cu defect types could be distinguished with an accuracy rate of 99.94%.Next,seven effective MMEs were used as independent channels in the artificial neural network to quantify the height variation in the Cu flling in the z-direction.The accuracy rate was 98.92%after training,and the recognition accuracy reached 1 nm.The proposed approach rapidly and nondestructively evaluates the annealing bonding performance of CMP processes,which can improve the reliability of high-density integration. | Qimeng Sun Dekun Yang Tianjian Liu Jianhong Liu Shizhao Wang Sizhou Hu Sheng Liu Yi Song | 2023 | Microsystems & Nanoengineering2023，9，2： | 0 |
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